Gap-Structured Insulator for Contamination-Resistant Ion Implanters
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Solution Overview
Problem
The insulating performance of insulating structures in ion implanters deteriorates due to the adhesion of conductive contaminants, requiring frequent maintenance and reducing productivity.
Innovation Solution
An insulating structure with a specific design, including a shaft portion and a surrounding portion with a gap that communicates with the outside, is formed using electrical insulating material to prevent contaminant adhesion and maintain insulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the insulating structure is provided without a gap configuration, then the structural integrity and support function are improved, but the insulating performance deteriorates due to contaminant adhesion
Solution Approach 1:
The insulating structure incorporates a gap (void space) between the shaft portion and surrounding portion, creating a porous configuration that allows contaminants to pass through rather than adhere to the insulating surface. This prevents contaminant accumulation while maintaining structural support function.
Solution Approach 2:
The insulating structure is divided into multiple portions (shaft portion and surrounding portion) with a gap between them, rather than being a solid continuous structure. This segmentation creates the contaminant-passing pathway while maintaining the necessary mechanical support.
2Ease of manufacture
If the insulating structure is designed as a solid continuous structure, then the manufacturing simplicity is improved, but the maintenance frequency increases due to contaminant adhesion
Solution Approach 1:
The gap configuration creates a porous structure that prevents contaminant adhesion, thereby reducing maintenance frequency. While slightly more complex than a solid structure, the gap can be formed through relatively simple manufacturing methods such as co-molding or assembly of pre-formed components.
3Reliability
If the insulating structure is provided with a gap configuration, then the insulating performance is improved by preventing contaminant adhesion, but the structural complexity increases
Solution Approach 1:
The gap creates a porous configuration that prevents contaminant adhesion and maintains insulating performance. The structural complexity is minimized by using a simple annular gap between the shaft and surrounding portion, rather than complex internal channel structures.
4Volume of moving object
If the insulating structure is provided without gap, then the structural compactness is improved, but the contaminant adhesion increases leading to performance deterioration
Solution Approach 1:
The gap creates a porous structure that allows contaminants to pass through rather than adhere, preventing the harmful effect of contaminant adhesion. The volume increase is minimal, consisting only of the annular gap space between the shaft and surrounding portion.
Data Source
AI summary
There is provided an insulating structure including a first end portion, a second end portion, a shaft portion connecting the first end portion and the second end portion to each other, and a surrounding portion including an inner surface facing an outer surface of the shaft portion and extending toward the second end portion from the first end portion. A gap between the outer surface of the shaft portion and the inner surface of the surrounding portion is configured to communicate with an outside. The first end portion, the second end portion, the shaft portion, and the surrounding portion are formed of electrical insulating material.