Gas Amplification Detector for High-Pressure STEM Imaging

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Solution Overview

Problem

Conventional detectors for high-pressure scanning transmission electron microscopes face challenges in maintaining image contrast and efficiency due to gas scattering, contamination, and incompatibility with reactive precursors, especially when imaging wet samples or performing electron-beam induced chemical processing.

Innovation Solution

The use of gas amplification detectors with metal electrodes to separate and amplify secondary electrons, allowing for efficient imaging by converting high energy transmitted electrons into low energy secondary electrons, which are then amplified in a gas cascade, while metal electrodes are designed to be resistant to contamination and reactive chemicals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional solid state detectors or scintillator-photomultiplier detectors are used in high-pressure STEM, then detector efficiency and image contrast are maintained, but the detectors are incompatible with reactive precursors and susceptible to contamination from wet samples

Engineering Contradiction:
Improvedetector compatibility with reactive precursorsVSAvoidcontamination from wet samples
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a gas amplification region as an intermediary between the high-pressure sample environment and the detector. This gas-filled region allows reactive precursors and wet sample contaminants to be present in the sample chamber without directly contacting the detector, as the gas acts as a protective barrier. The electron signal is amplified in this intermediate gas region before reaching the detector, maintaining signal strength while preventing contamination.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent creates an inert gas environment in the amplification region to protect the detector from reactive precursors and contaminants. By filling the amplification region with an inert gas, the detector is shielded from direct exposure to reactive chemicals and wet sample contaminants, allowing reliable operation in high-pressure environments with electron-beam induced chemical processing.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Reliability

If gas amplification is used to amplify electron signals in high-pressure STEM, then detector efficiency is improved, but image contrast is degraded due to gas scattering of transmitted electrons

Engineering Contradiction:
Improvedetector efficiencyVSAvoidimage contrast
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

The patent segments the electron detection process into distinct spatial regions: a first region for collecting transmitted electrons from the sample, and a second gas amplification region separated from the first region. This segmentation allows electrons to be collected before undergoing gas amplification, preventing gas scattering from degrading the spatial information and image contrast while still achieving signal amplification.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces an aperture or electron optical element as an intermediary between the sample and the gas amplification region. This intermediary selectively transmits electrons while blocking scattered electrons, maintaining image contrast information. The gas amplification then occurs in a separate region downstream, amplifying the already-sorted electron signal without introducing scattering-induced contrast loss.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If high pressure is applied to the sample chamber for imaging wet samples, then sample preservation is improved, but electron beam scattering by gas molecules increases

Engineering Contradiction:
Improvesample preservationVSAvoidelectron beam transmission
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

The patent segments the electron beam path into a high-pressure sample chamber region and a low-pressure detection region. By maintaining high pressure only in the sample chamber where wet samples need to be preserved, and keeping the detection region at lower pressure, the system allows sample preservation without excessive gas scattering along the entire electron beam path.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a pressure-limiting aperture as an intermediary between the high-pressure sample chamber and the detection region. This aperture maintains the high-pressure environment necessary for wet sample preservation while limiting the amount of gas in the electron beam path to the detection region, thereby reducing gas scattering and maintaining electron beam transmission efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances image contrast and detector efficiency, reduces contamination issues, and allows for compatibility with electron-beam induced chemical processing, enabling effective imaging of wet samples and chemical processing in high-pressure environments.

Implementation Method 1

The use of gas amplification detectors with metal electrodes to separate and amplify secondary electrons, allowing for efficient imaging by converting high energy transmitted electrons into low energy secondary electrons, which are then amplified in a gas cascade

Methodology Applied
Scientific EffectGas cascade amplification: Townsend Discharge

Implementation Method 2

converting high energy transmitted electrons into low energy secondary electrons, which are then amplified in a gas cascade

Methodology Applied
Scientific EffectElectron impact secondary emission: Electron Impact Desorption

Data Source

PatentUS8299432B2Scanning transmission electron microscope using gas amplification
Publication Date: 2012.10.30 FEI CO
  • US8299432B2 patent drawing
  • US8299432B2 patent drawing
  • US8299432B2 patent drawing

AI summary

A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.