Gas Analysis Dilution Unit for Semiconductor Substrate Pollution Monitoring
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Solution Overview
Problem
Existing gas analysis devices require multiple units for different measurement ranges, leading to increased cost and size, and suffer from pollution and long response times due to clogging and residual gases when analyzing gases of varying concentrations.
Innovation Solution
A gas analysis device with a dilution unit that adjusts gas flow to maintain constant, low concentrations, allowing a single analysis unit to handle multiple concentration ranges, reducing contamination risks and response times by continuously diluting gas flows through the analysis unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple analysis devices are used for different measurement ranges, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The analysis device is designed with a dilution unit that enables a single device to handle multiple concentration ranges by dynamically adjusting the dilution factor. The device can analyze both high concentration gases (by using lower dilution factors) and low concentration gases (by using higher dilution factors), making one device universal for multiple measurement ranges that previously required separate dedicated devices.
Solution Approach 2:
The invention changes the operational parameters of the analysis device by introducing a variable dilution factor. By adjusting the dilution coefficient according to the expected concentration range of the gas to be analyzed, the device adapts its measurement range dynamically, allowing precise measurements across different concentration levels without requiring multiple fixed-range devices.
2Adaptability or versatility
If gas flows of different concentrations are analyzed sequentially, then adaptability is improved, but response time increases due to long waiting periods to eliminate residual gases
Solution Approach 1:
The dilution unit acts as an intermediary between the gas sample and the analysis unit. By continuously introducing dilution gas, it maintains a constant flow of diluted gas through the sampling pipe and analysis unit, preventing residual gases from accumulating and enabling faster transition between different gas samples without long purge times.
Solution Approach 2:
The system maintains continuous flow of diluted gas through the analysis unit by constantly adding dilution gas. This continuous action prevents the buildup of residual gases and ensures that the analysis unit is always ready for the next measurement, eliminating the need for waiting periods between analyses of different gas streams.
3Measurement precision
If high concentration gas flows are analyzed first, then measurement precision for high concentrations is improved, but harmful factors increase due to pollution and clogging of the sampling pump and analysis unit
Solution Approach 1:
The dilution gas is introduced in advance and continuously throughout the analysis process. This preliminary action of pre-diluting the gas sample prevents high concentration gases from directly contacting and contaminating the sampling pump and analysis unit components, protecting them from clogging and pollution while still allowing accurate measurement of high concentration gases when needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient analysis of gases across extended ranges with reduced contamination and faster response times, as the dilution unit maintains constant, low concentrations, minimizing the risk of pollution and clogging, and allowing the same analysis unit to handle various gas concentrations.
Implementation Method 1
a dilution unit configured to dilute a flow of gas to be analyzed according to a dilution coefficient
Implementation Method 2
an analysis unit communicating with the dilution unit via a sampling pipe to sample a flow of diluted gas by pumping
Data Source
Figure 1~4
Figure 2~3
AI summary
The invention relates to a station for measuring gaseous pollution in a transport enclosure of semiconductor substrates comprising a gas analysis device for determining the concentration of the gas to be analysed, said analysis device including: a diluting unit (3) configured to dilute a flow of gas to be analysed (Q) according to a dilution coefficient (D), and an analysis unit (5) communicating with the diluting unit (3) via a sampling pipe (7) in order to sample a flow of diluted gas (Qa) by pumping, and comprising at least one processing means for: analysing the sampled flow of diluted gas (Qa), and determining the concentration (C) of the gas flow to be analysed (Q) according to said analysed flow of diluted gas (Qa) and the dilution coefficient (D). The invention further relates to an associated gas analysis method.