Gas Analyzer Micromechanical Oscillator Flow Control
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Solution Overview
Problem
Existing gas analyzers are inefficient in reliably measuring the density and viscosity of gas mixtures, such as natural gas, and are costly to produce, limiting their effectiveness in applications like burner control.
Innovation Solution
A gas analyzer design featuring a vibronic sensor element with a micromechanical oscillator, structured SOI wafer sensor plate, and coordinated fluid channels to control gas flow, combined with magnetic fields and resistive converters, ensuring precise oscillation measurements and reduced production costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a vibronic sensor element with micromechanical oscillator is used to measure gas mixture properties, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The micromechanical oscillator is integrated within the sensor plate structure, which itself is part of the connection plate assembly. The oscillator cavity is formed within the sensor plate, creating a nested configuration where the oscillator is housed within the sensor plate's internal structure, reducing overall device complexity while maintaining measurement precision
Solution Approach 2:
The fluid channels are designed to automatically guide gas flow from the media openings through the oscillator cavity without requiring external control mechanisms. The recess and depression structures in the sensor plate self-regulate the flow path, eliminating the need for additional valves or pumps, thus reducing device complexity
2Measurement precision
If fluid channels with recess and depression structures are designed to control gas flow, then measurement precision is improved, but manufacturing precision requirements increase
Solution Approach 1:
The fluid channels, recess, and depression structures are all formed within the single sensor plate component. By integrating multiple flow control features into one part rather than assembling separate components, the manufacturing process is simplified and precision requirements are reduced while still achieving the desired flow control for accurate measurements
3Reliability
If the oscillator opening is positioned at a specific distance from media openings, then flow influence on oscillator is reduced, but device complexity increases
Solution Approach 1:
The solution addresses flow influence not by increasing spatial distance in one dimension, but by using the third dimension (depth) to create the recess and depression structures. These dimensional features redirect gas flow paths in multiple directions, reducing direct flow impact on the oscillator without requiring excessive spacing that would increase device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables reliable and cost-effective measurement of gas mixture properties, minimizing flow influence on oscillator behavior and enhancing accuracy in determining parameters like calorific value and Wobbe index.
Implementation Method 1
the sensor plate having a micromechanical oscillator arranged in the oscillator cavity that can be excited to mechanical vibrations perpendicular to the joining planes
Implementation Method 2
the oscillator has a resistive converter with at least one resistance element having a deformation-dependent resistance value
Implementation Method 3
the oscillator has at least one conductor loop to generate a first magnetic field, wherein the gas analyzer further comprises a field source for a second magnetic field, wherein the first magnetic field and the second magnetic field each have at least one component that runs parallel to the surface normal of the sensor plate
Data Source
Figure 1a~1b
Figure 2~3
Figure 4
AI summary
The invention relates to a gas analyzer (100) for measuring the density and/or the viscosity of a medium, in particular a gas mixture, comprising the following: a connection panel (110) that has a first media opening (112) and a second media opening (114), each of which extends from a first surface to a second surface of the connection panel (110); a sensor panel (130) which is joined together with the connection panel (110) on a first joint plane; and a cover panel (160) which is joined together with a sensor panel on a second joint plane on a sensor panel (130) face facing away from the connection panel (110). The cover panel (160) has a cover cavity (162) which communicate with the first and second media opening (112, 114), and the sensor panel (130) has at least one oscillator cavity (140) which communicates with the first media opening (112) and the second media opening (114). The sensor panel (130) has a micromechanical oscillator (142) which is arranged in the oscillator cavity (140) and can be excited so as to mechanically vibrate perpendicularly to the joint planes.