Gas Distribution Assembly Alignment for Uniform Film Deposition
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Solution Overview
Problem
Gas distribution assemblies in film deposition processes experience eccentricity issues between the shower plate and exhaust duct due to temperature changes, leading to uneven gas distribution and varied film thickness profiles.
Innovation Solution
The use of positioning devices, such as pins or screws, connected to the exhaust duct to maintain alignment with the shower plate, reducing eccentricity and improving uniformity by adjusting the attachment devices to compensate for thermal expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the shower plate and exhaust duct are rigidly fixed without positioning devices, then the assembly structure is simple, but temperature changes cause thermal expansion and misalignment leading to eccentricity
Solution Approach 1:
The positioning devices allow the exhaust duct to dynamically adjust its position relative to the shower plate in response to thermal expansion, transitioning from a static rigid connection to a dynamic adjustable connection that maintains alignment precision while accommodating temperature changes
Solution Approach 2:
The positioning devices enable change in the spatial parameters (position and orientation) of the exhaust duct relative to the shower plate, allowing adjustment of alignment parameters to compensate for thermal expansion effects and maintain manufacturing precision under varying temperature conditions
2Manufacturing precision
If positioning devices are added to maintain alignment, then alignment precision is improved, but the device complexity increases
Solution Approach 1:
The positioning system is segmented into multiple discrete positioning devices distributed around the exhaust duct, allowing individual adjustment of each device to collectively maintain overall alignment precision without requiring a single complex positioning mechanism
Solution Approach 2:
Positioning devices are strategically placed at specific locations around the exhaust duct where they provide localized alignment correction, with each device addressing specific local misalignment issues to achieve global alignment precision through distributed local adjustments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The positioning devices effectively reduce eccentricity between the shower plate and exhaust duct, ensuring consistent gas distribution and uniform film deposition across the substrate, even at varying temperatures.
Implementation Method 1
as temperatures change throughout the deposition process, components of the assembly may shift and/or expand, thereby causing the shower plate to deviate from the center of the assembly
Data Source
AI summary
A gas distribution assembly and method for reducing the eccentricity between a shower plate and an exhaust duct are disclosed. The gas distribution assembly includes positioning devices configured to reduce misalignment between the shower plate and the exhaust duct. The gas distribution assembly and method can be used to improve uniformity of film deposition thickness.