Gas Barrel Valve Actuation With Spring Shutdown for Leak Response
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Solution Overview
Problem
Existing gas supply systems in semiconductor fabrication processes face issues such as human error during gas barrel replacement, lack of automatic shut-off mechanisms for gas leaks, and difficulties in quickly closing gas spray nozzles during power outages or earthquakes, leading to safety risks and inefficiencies.
Innovation Solution
A device with a main plate that aligns and loads gas barrels, automatically separates and stores end caps, and uses a valve handle unit with a spring-winding mechanism to automatically open and close the gas barrel valve, ensuring safe and efficient gas supply by preventing leaks and allowing manual operation during emergencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual gas barrel replacement is performed by workers, then the process is simple and flexible, but human errors occur and safety risks increase
Solution Approach 1:
The gas barrel replacement system performs operations autonomously without human intervention. The automatic replacement device loads gas barrels, connects them to gas supply lines, opens valves, and monitors for leaks independently, eliminating human errors while maintaining operational simplicity through automated control sequences
Solution Approach 2:
Manual mechanical operations by workers are replaced with an automated mechanical system equipped with actuators, sensors, and control units. The system uses automated mechanisms for barrel handling, connection, valve operation, and leak detection, substituting human physical actions with programmable mechanical systems that ensure consistent and safe operation
2Productivity
If automatic gas barrel replacement is implemented, then productivity increases and labor costs decrease, but device complexity increases
Solution Approach 1:
The automatic replacement system is divided into functional modules: barrel loading mechanism, connection unit with actuator, valve control system, and leak detection sensors. Each module performs a specific task independently, allowing the complex replacement process to be managed through modular components that can be controlled and maintained separately
Solution Approach 2:
The automatic replacement device is designed to handle multiple gas barrels with different specifications using universal mounting structures and adaptive connection mechanisms. The system can accommodate various barrel types while maintaining the same automated operation sequence, reducing the need for multiple specialized devices
3Reliability
If quick valve closure mechanism is added for emergency shutdown, then safety against gas leaks improves, but device complexity increases
Solution Approach 1:
The system pre-positions actuators and control mechanisms ready for immediate valve closure in case of detected gas leaks. Sensors continuously monitor for leak conditions, and upon detection, the control system instantly activates the actuators to close valves, preventing gas release before it can cause harm. This preliminary preparation ensures rapid response without requiring complex emergency infrastructure
Solution Approach 2:
The leak detection system provides continuous feedback to the control unit, which automatically triggers valve closure when leak conditions are detected. The system monitors gas concentrations, pressure changes, and other parameters, and uses this feedback to activate the emergency shutdown sequence, creating a closed-loop safety mechanism that responds dynamically to actual conditions
4Speed
If spring-winding mechanism is used for automatic valve operation, then response speed during power outages improves, but manufacturing complexity increases
Solution Approach 1:
The spring-winding mechanism is pre-loaded during normal operation when power is available, storing mechanical energy in the spring. In case of power outage, this pre-stored energy is immediately released to drive the valve closure mechanism, ensuring rapid response without requiring external power. The system prepares the mechanical energy storage in advance, eliminating the need for complex emergency power systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution automates gas barrel replacement, quickly shuts off gas supply during leaks or power outages, and stabilizes gas flow, reducing labor costs and safety hazards while ensuring reliable operation.
Implementation Method 1
a spring-winding mechanism to automatically open and close the gas barrel valve
Data Source
AI summary
Disclosed is a device for automatically opening or closing a gas barrel valve. The device includes: a main plate installed so as to move up and down and to align the position of a gas barrel loaded in a cabinet; a gas barrel connecting portion installed on the lower portion of the main plate, separating an end cap from the gas barrel and storing the end cap, and then automatically screw-coupling a connector holder to a gas spray nozzle; a valve handle unit installed on the main plate so as to rotate around a first shaft and rotating a valve handle of the gas barrel such that the valve handle is locked or unlocked, while encompassing the valve handle of the gas barrel; and a valve handle opening or closing unit installed on the upper portion of the main plate so as to operate the valve handle unit in a direction, in which a valve of the gas barrel is opened.


