In-situ Gas Blending for Semiconductor Dilute Fluid Delivery
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Solution Overview
Problem
Current methods for supplying dilute gases in the semiconductor industry face challenges such as high gas supply vessel exhaustion rates, variable gas concentrations, safety concerns due to high pressure, and inefficiencies in in-situ gas generation, leading to inaccurate concentration control and extended downtime.
Innovation Solution
A system comprising an active fluid source, a diluent fluid source, a fluid flow metering device, a mixer, a monitor, and a pressure controller, which adjusts the fluid flow rates and pressures to maintain predetermined concentrations and pressures of the diluted gas mixture, ensuring accurate and efficient delivery of dilute fluids to semiconductor manufacturing tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pre-mixed high-pressure gas mixtures are used as source gas, then gas supply reliability is improved, but safety hazards increase due to high pressure and frequent vessel change-outs
Solution Approach 1:
The gas supply system is segmented into separate active gas source and diluent gas source, allowing independent control and monitoring of each gas stream. This segmentation enables the system to maintain reliable gas supply while operating at lower, safer pressures by combining gases at the mixing point rather than storing high-pressure mixtures.
Solution Approach 2:
A gas blender acts as an intermediary device between the gas sources and the process equipment. It receives pure active gas and diluent gas separately, mixes them in controlled proportions, and delivers the diluted mixture. This intermediary function eliminates the need to store or transport high-pressure gas mixtures, reducing safety hazards while maintaining supply reliability.
2Object-affected harmful factors
If in-situ gas generation is used, then safety is improved by avoiding high-pressure vessels, but response time deteriorates due to substantial time required to initiate gas generation
Solution Approach 1:
The system pre-prepared both active gas and diluent gas in separate sources, keeping them ready for immediate use. When gas supply is needed, the pre-prepared gases can be immediately mixed and delivered without the delay of initiating chemical reactions, thus maintaining safety while achieving quick response time.
Solution Approach 2:
The invention extracts the time-consuming chemical reaction step from the gas supply process by using pre-prepared gas sources. This separation allows the system to skip the lengthy initiation period required for in-situ generation while still avoiding high-pressure storage, achieving both safety and speed.
3Measurement precision
If mass flow controllers are used to control gas flows, then concentration control precision is improved, but system complexity increases
Solution Approach 1:
The gas blender incorporates feedback control mechanisms that continuously monitor gas flow rates and mixing ratios, automatically adjusting parameters to maintain precise concentration control. This feedback system achieves high measurement precision while managing complexity through intelligent control algorithms rather than overly complex hardware.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides precise control over dilute gas concentrations and pressures, reducing downtime, enhancing safety, and improving the economic efficiency of gas supply operations by preventing premature or delayed exhaustion of gas sources and maintaining consistent gas delivery.
Implementation Method 1
a monitor arranged to sense concentration of active gas in the diluted active gas mixture
Implementation Method 2
a mixer arranged to mix active gas from the active gas source that is dispensed at the predetermined flow rate by the gas flow-metering device, with diluent gas to form a diluted active gas mixture
Data Source
AI summary
A system (10) for delivery of dilute fluid, utilizing an active fluid source (12), a diluent fluid source (14), a fluid flow metering device (24) for dispensing of one of the active and diluent fluids, a mixer (38) arranged to mix the active and diluent fluids to form a diluted active fluid mixture, and a monitor (42) arranged to sense concentration of active fluid and/or diluent fluid in the diluted active fluid mixture, and responsively adjust the fluid flow metering device (24) to achieve a predetermined concentration of active fluid in the diluted active fluid mixture. A pressure controller (34) is arranged to control flow of the other of the active and diluent fluids so as to maintain a predetermined pressure of the diluted active fluid mixture dispensed from the system. The fluid dispensed from the system then can be adjustably controlled by a flow rate controller, e.g., a mass flow controller, to provide a desired flow to a fluid-utilizing unit, such as a semiconductor process tool. An end point monitoring assembly is also described, for switching fluid sources (12, 15) to maintain continuity of delivery of the diluted active fluid mixture.