Compressed-Gas Bubble Cooling for Fixed-Temperature Liquid Supply
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Solution Overview
Problem
Existing fixed temperature liquid supply apparatuses for processing units in semiconductor manufacturing are costly to operate due to high-energy cooling requirements, necessitating a more efficient and cost-effective solution for maintaining liquid at a predetermined temperature.
Innovation Solution
A fixed temperature liquid supply apparatus utilizing a tank with a compressed gas supply system, where compressed gas bubbles cool the liquid, which is then circulated and supplied to processing units, eliminating the need for large-scale cooling equipment and reducing operational costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If high-output cooling means are operated to supply fixed temperature liquid to processing apparatus, then the liquid temperature control ability is improved, but the operation cost increases
Solution Approach 1:
The invention extracts only the essential cooling function from complex cooling systems. By using a simple tank with compressed gas bubbles to cool liquid, it achieves temperature control without requiring high-output cooling means, thereby reducing operation cost while maintaining liquid temperature.
Solution Approach 2:
The system uses the liquid itself as the cooling medium. The liquid circulates through the processing apparatus, absorbs heat, returns to the tank, and is cooled by compressed gas bubbles. This self-service cooling cycle eliminates the need for external high-power cooling equipment.
2Adaptability or versatility
If high-output cooling means are used to realize the ability to supply liquid to multiple processing apparatuses, then the liquid supply capability is improved, but the apparatus size increases
Solution Approach 1:
The tank-based cooling system serves multiple processing apparatuses simultaneously. A single tank with compressed gas cooling can supply cooled liquid to multiple apparatuses, making the system universal and eliminating the need for separate cooling systems for each apparatus, thereby reducing overall size.
3Temperature
If complex cooling systems are deployed to maintain liquid temperature, then the temperature control precision is improved, but the device complexity increases
Solution Approach 1:
The invention extracts the essential temperature control function from complex cooling systems. By using only a tank and compressed gas bubbles for cooling, it achieves adequate temperature control precision without requiring complex cooling systems, thereby reducing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the size and operational costs of the apparatus while effectively maintaining liquid at a predetermined temperature, enhancing efficiency and reducing energy consumption.
Implementation Method 1
The liquid accommodated in the tank is cooled by bubbles of the compressed gas
Implementation Method 2
The liquid accommodated in the tank is cooled by bubbles of the compressed gas
Data Source
AI summary
A fixed temperature liquid supply apparatus for supplying liquid adjusted in temperature to a processing apparatus including a processing unit includes a tank that accommodates the liquid, a thermometer that measures the temperature of the liquid accommodated in the tank, and a compressed gas supply pipe one end of which is connected to a compressed gas source reserving a compressed gas, the other end of which reaches the tank, and which supplies the compressed gas from the compressed gas source to the tank. The liquid accommodated in the tank is cooled by bubbles of the compressed gas, and the cooled liquid is supplied to the processing apparatus.