Gas Cabinet Air Plenum Layout for Lower Exhaust Flow

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional gas cabinets require high exhaust flow rates and energy consumption to prevent gas emissions, due to inefficiencies in airflow design that allow process gases to diffuse outside the cabinet.

Innovation Solution

Incorporating an air plenum behind the air intake vent to increase the airflow path length within the gas cabinet, redirecting ambient air through a gap and additional openings to minimize gas diffusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high exhaust flow rate is used to prevent gas emissions, then gas containment reliability is improved, but energy consumption increases

Engineering Contradiction:
Improvegas containment reliabilityVSAvoidenergy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent applies preliminary action by extending the airflow path length before air enters the cabinet interior. The air intake vent includes an extended path that forces air to travel a longer distance and follow a more complex flow pattern before reaching the interior space. This preliminary airflow conditioning ensures better gas sweeping capability at lower exhaust flow rates, resolving the contradiction between containment reliability and energy consumption

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies dimensionality change by adding spatial complexity to the airflow path. The air intake vent structure extends the airflow path in multiple dimensions, creating a more three-dimensional flow pattern that increases path length without significantly increasing the physical footprint of the cabinet. This allows better gas containment at lower energy consumption by utilizing spatial geometry rather than simply increasing exhaust flow rate

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If high exhaust flow rate is used to prevent gas emissions, then gas containment reliability is improved, but ventilation system load increases

Engineering Contradiction:
Improvegas containment reliabilityVSAvoidventilation system load
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The extended airflow path in the air intake vent performs preliminary gas sweeping action before air enters the cabinet interior. This preliminary action ensures that leaked gases are captured and directed toward the exhaust at lower flow rates, reducing the power burden on the ventilation system while maintaining containment reliability

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

By extending the airflow path in multiple dimensions through the air intake vent structure, the patent creates more effective gas capture geometry. This dimensional approach improves gas containment efficiency, allowing the ventilation system to operate at lower power levels while maintaining the same level of gas emission prevention

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-generated harmful factors

If air intake vent openings are made deeper, then gas diffusion outside the cabinet is reduced, but device complexity increases

Engineering Contradiction:
Improvegas diffusion outside cabinetVSAvoiddevice complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The air intake vent structure performs preliminary airflow conditioning by extending the path length before air enters the cabinet. This preliminary action reduces gas diffusion outside the cabinet by ensuring air flows deeper and more effectively sweeps the interior space, achieving the goal without adding complex internal components

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The extended air intake vent structure acts as an intermediary element between the external environment and the cabinet interior. This intermediary structure lengthens the airflow path and improves gas capture efficiency without requiring complex internal modifications to the cabinet itself, thus reducing gas diffusion while limiting complexity increase

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces gas emissions and exhaust flow rates, lowering energy consumption and ventilation system load by enhancing airflow path length and preventing gas diffusion.

Implementation Method 1

An exhaust ventilation system coupled to the exhaust port to create a negative pressure within the interior of the enclosure

Methodology Applied
Scientific EffectNegative pressure: Pressure Gradient

Implementation Method 2

draw ambient air from outside of the enclosure into the interior of the enclosure and create an airflow through the interior of the enclosure that sweeps any process gas

Methodology Applied
Scientific EffectAirflow: Convection

Implementation Method 3

increasing the airflow path length from the outside of the exhausted enclosure into the interior of the enclosure... reduces diffusion of process gas outside of the exhausted enclosure

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS12447513B2Gas cabinet with reduced gas emissions and exhaust flow rate
Publication Date: 2025.10.21 TOKYO ELECTRON LTD
  • US12447513B2 patent drawing
  • US12447513B2 patent drawing
  • US12447513B2 patent drawing

AI summary

Embodiments of improved gas cabinets and associated methods are provided herein to reduce diffusion of process gas outside of a gas cabinet. In the disclosed embodiments, a gas cabinet is provided with: (a) an exhausted enclosure for housing at least one gas vessel (containing a process gas) and associated gas distribution components within an interior of the enclosure, (b) an air intake vent for drawing ambient air from outside of the exhausted enclosure into an interior of the exhausted enclosure, and (c) an air plenum that is mounted within the interior of the exhausted enclosure directly behind the air intake vent for increasing the airflow path length from the outside of the exhausted enclosure into the interior of the enclosure. By increasing the airflow path length, the air plenum provided within the gas cabinet reduces the diffusion of process gas outside of the exhausted enclosure.