Gas Concentration Device Using Multiplexed Beam Guidance
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Solution Overview
Problem
Current methods for trace gas analysis in cleanrooms lack fine temporal and spatial resolution, and are prone to cross-contamination, with limited accessibility and dense network restrictions, especially in semiconductor manufacturing environments.
Innovation Solution
A device utilizing a radiation source, beam guiding apparatus, spectrometer, control unit, and evaluation unit for multiplexed beam guidance, enabling high-resolution temporal and spatial analysis of gas concentrations using infrared or microwave spectroscopy, allowing for targeted observation and simultaneous measurement of multiple gases with low concentrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If collection vessels are used for trace gas analysis, then gas concentration can be measured, but temporal resolution is poor and spatial resolution is restricted
Solution Approach 1:
The patent replaces mechanical collection vessels with an optical measurement system using infrared radiation and Fourier transform spectrometry. This substitution enables real-time, continuous measurement of gas concentrations without the temporal integration inherent in collection vessel methods, thereby achieving fine temporal resolution while maintaining measurement precision.
2Measurement precision
If collection vessels are used for trace gas analysis, then gas concentration can be measured, but spatial resolution is restricted due to limited accessibility
Solution Approach 1:
The patent replaces physical collection vessels that require placement at specific accessible locations with a mobile optical measurement system. The beam guiding apparatus can be directed to any location in the cleanroom, including previously inaccessible areas, enabling high spatial resolution measurements throughout the entire examination volume without being constrained by physical accessibility.
3Speed
If individually put-up gas sensors are used, then real-time measurement is possible, but cross contaminations occur and device complexity increases
Solution Approach 1:
The patent employs a single universal optical measurement system that can measure multiple different gases simultaneously using Fourier transform spectrometry. This multi-functional approach eliminates the need for multiple individual gas sensors, thereby preventing cross-contamination between sensors while maintaining real-time measurement capabilities for various trace gases.
Solution Approach 2:
The patent introduces infrared radiation as an intermediary medium that interacts with gases without physical contact. The electromagnetic beam passes through the gas samples, allowing measurement without direct contact between the measurement device and the gas, thereby eliminating cross-contamination while achieving real-time measurement.
4Measurement precision
If a dense network of assembly points is established, then spatial resolution improves, but device complexity and cost increase
Solution Approach 1:
The patent employs a mobile, dynamically reconfigurable optical measurement system with a beam guiding apparatus that can be positioned and directed to any location in the cleanroom. This dynamic approach replaces the need for a fixed, dense network of assembly points, achieving high spatial resolution through flexible, on-demand measurement positioning rather than through a complex permanent infrastructure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides real-time, spatially resolved gas concentration analysis, capable of detecting local contaminations and leaks with high precision, reducing cross-contamination and improving accessibility, enabling automated scanning of cleanrooms with minimal disruption.
Implementation Method 1
a radiation source (Qu), by means of which an electromagnetic beam (ST) can be generated
Implementation Method 2
a spectrometer (S) which is arranged downstream of the beam guiding apparatus (LE) and by means of which it is possible to carry out a spectral analysis of the beam (ST) leaving the beam guiding apparatus (LE)
Data Source
AI summary
A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.