Gas Supply-Exhaust Control Parameter Selection Using Determination Models
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Solution Overview
Problem
The existing gas supply-exhaust systems in substrate processing apparatuses require extensive manual adjustments of control parameters for each constituent element, making the process highly time-consuming and labor-intensive.
Innovation Solution
A control assistance device that determines appropriate control parameter values by acquiring correspondence relationships between model identification information and parameter values, allowing for automatic determination of parameter values for constituent elements in the gas supply-exhaust system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual adjustment of control parameters is performed for each constituent element, then the system can be precisely controlled, but the time and labor required increase significantly
Solution Approach 1:
The system performs preliminary actions by automatically determining control parameters using determination models before actual operation begins. The control assistance device acquires processing information, selects appropriate determination models, and calculates optimal parameter values in advance, eliminating the need for time-consuming manual adjustments during setup or operation.
Solution Approach 2:
The system enables self-service by allowing the control assistance device to automatically determine control parameters without human intervention. The device independently acquires processing information, selects determination models based on processing recipes, calculates optimal parameters, and outputs results, making the parameter determination process autonomous and eliminating manual labor.
2Adaptability or versatility
If multiple determination models are used to handle individual differences in constituent elements, then the adaptability improves, but the system complexity increases
Solution Approach 1:
The control assistance device implements a universal system that can handle multiple types of constituent elements (gas suppliers, gas exhausters, etc.) with different characteristics through a single integrated platform. The determination model selection mechanism universally applies to various processing recipes and constituent element types, providing multi-functional capability without requiring separate systems for each case.
Solution Approach 2:
The control assistance device acts as an intermediary between the processing recipe information and the control parameters. It receives processing information, uses determination models as mediators to translate this information into optimal control parameters, and outputs the results. This intermediary role simplifies the overall system by centralizing the complex model selection and parameter calculation processes.
Data Source
AI summary
A control assistance device includes a correspondence relationship acquirer that acquires a correspondence relationship between a plurality of model identification information pieces for identification of a plurality of respective determination models that respectively determine normality degrees of operations of the constituent element based on processing information pieces representing operations or states relating to a process executed on a substrate by the substrate processing apparatus, and a plurality of parameter values, an information acquirer that acquires a model identification information piece corresponding to a determination model, among the plurality of determination models, that is configured to obtain a proper determination result based on processing information pieces during an operation of the constituent element, and a determiner that determines the parameter value for control of the constituent element based on the correspondence relationship acquired by the correspondence relationship acquirer and the model identification information piece acquired by the information acquirer.