Gas-Cooled RF Connection Rods to Prevent High-Power Arcing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional power connectors in substrate processing equipment, such as copper straps, pose a safety hazard due to high voltage differences leading to arcing and have sharp edges that can cause further arcing issues.
Innovation Solution
The use of RF power connection rods with a coaxial connecting arrangement of hollow rods that allow for high power transmission without arcing, featuring a gas flow path for cooling and a compact design with minimal sharp edges, and adjustable coupling to accommodate assembly tolerances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If copper straps are used to supply high power, then power transmission capability is improved, but arcing occurs due to sharp edges and high voltage difference
Solution Approach 1:
The patent replaces conventional copper straps with hollow cylindrical connection rods that have curved surfaces instead of sharp edges. The cylindrical geometry eliminates corner and edge effects that concentrate electric field, thereby preventing arcing while maintaining high power transmission capability through the hollow conductive structure.
Solution Approach 2:
The invention changes the geometric parameters of the power connector from flat strap configuration to three-dimensional hollow cylindrical rods. This parameter change transforms the electric field distribution, reducing field concentration at edges and corners, thus eliminating arcing while preserving power transmission functionality.
2Reliability
If conventional copper straps are used, then power connection is achieved, but safety hazards arise from arcing incidents
Solution Approach 1:
The hollow cylindrical connection rods provide continuously curved surfaces that eliminate sharp edges and corners. This geometric modification redistributes the electric field uniformly, preventing field concentration that leads to arcing and safety hazards, while maintaining reliable electrical connection for power transmission.
Solution Approach 2:
The patent employs hollow cylindrical rod structure that combines conductive material properties for power transmission with a geometric configuration that inherently prevents arcing. The composite design integrates both electrical functionality and safety characteristics into a unified connector structure.
3Temperature
If hollow rods with gas flow path are used, then cooling efficiency is improved, but device complexity increases
Solution Approach 1:
The hollow cylindrical connection rods serve multiple functions simultaneously: they provide electrical conduction for power transmission, structural support for mechanical connection, and fluid conduit for gas-based cooling. This multi-functionality integrates cooling capability into the existing connector structure without adding separate cooling components, thereby managing temperature effectively while controlling device complexity.
Solution Approach 2:
The gas flow path is nested within the hollow interior of the cylindrical connection rods. This nested configuration allows the cooling system to be integrated inside the existing structural and electrical component, eliminating the need for external cooling apparatus and reducing overall device complexity while maintaining effective cooling capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The RF power connection rods effectively handle high power, prevent arcing by eliminating sharp edges, and provide a compact, efficient design that maintains reliable connections and cooling, enhancing safety and operational efficiency in substrate processing.
Implementation Method 1
a gas flow path extends from one or more gas inlets of the first connection rod, through the first hollow portion to the second hollow portion, to one or more gas outlets disposed through the second connection rod
Data Source
AI summary
Embodiments of radio frequency (RF) power connection rods are provided herein. In some embodiments, an RF power connection rod includes a first connection rod having a first connection end, a first socket end opposite the first connection end, and a first hollow portion extending from the first connection end to the first socket end; a second connection rod having a second connection end, a second socket end opposite the second connection end, and a second hollow portion extending from the second connection end to the second socket end, wherein the second connection end is adjustably coupled to the first connection end along an axial direction of the second connection rod, and wherein a gas flow path extends from one or more gas inlets of the first connection rod, through the first hollow portion to the second hollow portion, to one or more gas outlets disposed through the second connection rod; a first plug coupled to the first socket end; and a second plug coupled to the second socket end.