Corrosion-Resistant Coating for Gas Delivery System Passages
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Solution Overview
Problem
Corrosion in gas delivery systems used in plasma processing, particularly in stainless steel components, leads to contamination of semiconductor substrates due to exposure to highly corrosive process gases, despite efforts like electropolishing and passivation, as moisture and gas interactions cause damage over time.
Innovation Solution
A flow coating method is employed where a fluidic precursor of a corrosion-resistant material is deposited and cured on the inner surfaces of gas passages, including steps of cleaning, drying, applying the precursor, removing excess, and curing, effectively forming a non-brittle, corrosion-resistant layer that prevents contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electropolishing and passivation are applied to stainless steel gas delivery system components, then initial corrosion resistance is improved, but corrosion damage occurs over time due to moisture and gas interactions
Solution Approach 1:
The patent applies preliminary action by depositing a corrosion-resistant coating on the inner surfaces of gas delivery system components before they are exposed to corrosive process gases. This preventive coating application protects the stainless steel components from corrosion throughout their service life, eliminating the need for subsequent maintenance or replacement due to corrosion damage.
Solution Approach 2:
The patent employs composite materials by combining stainless steel base material with an additional corrosion-resistant coating layer. This composite structure leverages the mechanical strength of stainless steel while the coating provides enhanced chemical resistance to corrosive gases, creating a multi-layer protective system that extends component service life.
2Reliability
If corrosion-resistant coatings are applied to gas passages, then corrosion protection is improved, but manufacturing complexity increases due to additional coating steps
Solution Approach 1:
The patent utilizes pneumatic principles by flowing a liquid precursor solution through the gas passages using fluid dynamics. The precursor is pumped through the passages and allowed to coat the inner surfaces, leveraging fluid flow to achieve uniform coating distribution without requiring complex application equipment or manual processes.
Solution Approach 2:
The patent applies self-service principles by allowing the liquid precursor to automatically coat the inner surfaces of the gas passages as it flows through them. The coating process utilizes the existing gas passage geometry and fluid flow characteristics to achieve self-uniform coating, eliminating the need for additional masking, alignment, or complex application mechanisms.
3Object-affected harmful factors
If a corrosion-resistant coating is formed on gas delivery system components, then substrate contamination is reduced, but processing time increases due to coating application and curing steps
Solution Approach 1:
The patent utilizes phase transitions by transforming the liquid precursor solution into a solid corrosion-resistant coating through evaporation or curing processes. This phase change allows the coating to be applied in liquid form for easy distribution, then converted to a durable solid protective layer that prevents substrate contamination during plasma processing.
Solution Approach 2:
The patent employs a disposable-like approach by using a liquid precursor that can be easily applied and discarded after curing. The precursor solution is inexpensive and can be rapidly applied, cured, and replaced if needed, providing a cost-effective and time-efficient method compared to traditional long-lasting but complex coating applications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly reduces corrosion in gas delivery systems, minimizing contamination of semiconductor substrates by forming a durable, non-brittle coating on inner surfaces, even in complex geometries and small diameters, thereby enhancing the yield and productivity in semiconductor fabrication.
Implementation Method 1
flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages
Implementation Method 2
curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating
Data Source
AI summary
A gas delivery system for a plasma process system such as a plasma etching system wherein inner surfaces of gas passages are coated with a corrosion-resistant material coating formed by curing a layer of fluidic precursor deposited on the inner surfaces. The coating can be formed by (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.