Gas Detection Equipment with Detachable Sampling Assemblies
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional gas detection systems in semiconductor manufacturing are inefficient in providing real-time multi-point detection due to the need for manual movement of detectors, which complicates monitoring and management across large plant areas.
Innovation Solution
A gas detection equipment with detachable sampling assemblies, each equipped with multiple sampling inlets, a solenoid valve assembly, and a sampling outlet, connected to a main body with a dispensing device and a detection device, allowing for selective and efficient sampling and detection of gases from multiple sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual movement of detectors is used for sampling, then detection can be performed at different locations, but detection efficiency and real-time monitoring capability deteriorate
Solution Approach 1:
Multiple sampling inlets from different locations are merged into a single sampling system that connects to one detection device. The sampling assemblies with multiple inlets collect gases from different areas simultaneously, and these samples are combined and analyzed by a single detection device, achieving both multi-location coverage and efficient detection.
Solution Approach 2:
The detection device serves multiple functions by analyzing samples from different locations through the sampling system. A single detection device can detect gases from multiple sampling inlets, making it versatile for monitoring different areas without requiring separate detectors for each location.
2Productivity
If multiple detectors are deployed for different target areas, then real-time detection capability improves, but device complexity and management difficulty increase
Solution Approach 1:
Instead of deploying multiple separate detectors, the system merges multiple sampling functions into a single integrated detection device. The sampling assemblies with multiple inlets bring samples from different areas to one detection device, reducing the number of detectors needed while maintaining real-time detection capability across multiple areas.
3Area of stationary object
If manual movement of detectors is used, then detection coverage can be achieved, but time consumption and manpower requirements increase
Solution Approach 1:
The sampling assemblies are pre-configured with multiple sampling inlets positioned to access different areas. This preliminary arrangement of sampling points allows simultaneous collection of gases from multiple locations without requiring manual movement during operation, thereby expanding detection coverage while reducing time consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-efficiency continuous multi-point detection, allowing for quick identification of abnormal gas conditions across different areas, thereby ensuring operational safety and maintaining product yield.
Implementation Method 1
a solenoid valve assembly and a sampling outlet, the plurality of sampling inlets being configured to be in communication with a plurality of detected gas sources, respectively, the solenoid valve assembly being configured to be in communication with the plurality of sampling inlets and the sampling outlet
Data Source
AI summary
A gas detection equipment is provided, including: a main body; sampling assemblies detachably connected to the main body, each sampling assembly including sampling inlets configured to be in communication with detected gas sources, a solenoid valve assembly configured to be in communication with the sampling inlets and the sampling outlet and to selectively control the sampling inlets to be communicated with or discommunicated from the sampling outlet, and a sampling outletdetected gas sources; a dispensing device disposed on the main body and in communication with the sampling outlet; a detection device disposed on the main body and in communication with the dispensing device with which controllimg communication between the sampling outlet and the detection devicedetected gas sources; a processing unit disposed on the main body, connected to the detection device, and configured to receive detected data from the detection device for calculation and analysis.