Gas Distribution Device with Variation Suppression for Uniform Flow
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Solution Overview
Problem
Existing gas distribution systems face challenges in uniformly supplying gas to multiple processing chambers, leading to variations in flow rates and reduced throughput due to the need for extensive piping and increased gas switching times.
Innovation Solution
A gas distribution device featuring a branch unit and a variation suppression unit, including a buffer unit with specific gap configurations, to distribute gas uniformly across multiple processing chambers, reducing flow rate variations and enhancing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If gas is supplied from a supply line having a small cross sectional area into a processing chamber having a large cross sectional area, then gas supply is achieved, but uniform distribution of gas becomes difficult
Solution Approach 1:
The supply line is divided into multiple branch lines that extend in different directions from a central axis. Each branch line supplies gas to a specific region of the processing chamber, enabling uniform distribution across the entire chamber volume despite the limited cross-sectional area of the main supply line.
Solution Approach 2:
Instead of expanding the cross-sectional area of a single supply line, the invention transitions to a three-dimensional distribution network where multiple branch lines radiate in different spatial directions. This dimensional approach allows gas to reach all regions of the large chamber uniformly without requiring a larger supply line.
2Manufacturing precision
If repeated distribution processes are used to supply gas to multiple processing chambers, then flow rate uniformity is improved, but apparatus size and line length increase
Solution Approach 1:
The distribution system is segmented into multiple branch lines that simultaneously supply gas to different processing chambers from a single supply line. This eliminates the need for repeated series distribution processes, reducing the total line length while maintaining flow rate uniformity across all chambers.
Solution Approach 2:
The invention transitions from a linear series distribution approach to a radial three-dimensional distribution network. Multiple branch lines extend in different directions from the supply line, enabling simultaneous gas supply to multiple chambers and reducing the overall line length required.
3Manufacturing precision
If line length is increased to distribute gas uniformly, then gas distribution uniformity is improved, but gas switching time increases
Solution Approach 1:
The supply line is segmented into multiple shorter branch lines that radiate in different directions. This segmentation reduces the maximum line length required compared to a single long distribution line, thereby reducing the volume of gas that needs to be evacuated during switching and reducing gas switching time while maintaining uniform distribution.
Solution Approach 2:
The invention uses a three-dimensional radial distribution network instead of a linear arrangement. This dimensional change allows gas to reach all processing chambers through shorter path lengths, reducing the overall gas volume in the distribution system and enabling faster gas switching while maintaining uniformity.
4Productivity
If multiple branch lines are used to supply gas to multiple processing chambers, then throughput is improved, but flow rate variation between chambers increases
Solution Approach 1:
The supply line is divided into multiple branch lines that simultaneously supply gas to different processing chambers. This segmentation enables parallel processing in multiple chambers (improving throughput) while the geometric design of the branch lines ensures uniform flow distribution, maintaining flow rate consistency across all chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces flow rate variations and maintains high processing throughput by diffusing gas flow in the buffer unit, allowing for efficient gas distribution and rapid switching between processing gases.
Implementation Method 1
The variation suppression unit is provided between the branch unit and the first gas supply source and configured to supply the first gas from the first gas supply source to the branch unit and suppress variation in flow rates of the first gas distributed by the branch unit between the first supply lines
Data Source
AI summary
A gas distribution device includes a plurality of supply lines, a branch unit and a variation suppression unit. The supply lines are respectively connected to a plurality of processing chambers. The branch unit is configured to distribute a gas supplied from a gas supply source to the supply lines. The variation suppression unit is provided between the branch unit and the gas supply source and configured to supply the gas from the gas supply source to the branch unit and suppress variation in flow rates of the gas distributed by the branch unit between the supply lines.