Semiconductor Gas Pipe Fitting with Visual Fastening and Gasket Check
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Solution Overview
Problem
Existing semiconductor gas pipe fitting assemblies lack effective methods to verify the correct fastening of nuts, leading to potential leakage and over-fastening issues, while also requiring image marking for proper assembly.
Innovation Solution
A semiconductor gas pipe fitting fastener system that includes a female nut member with color indicators to show the fastening state and a gasket member with a protrusion and indicator to display the gasket material, allowing for remote verification of fastening and preventing over-fastening without the need for image marking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a male nut is rotated during fastening, then the fastening operation can be performed, but leakage is generated
Solution Approach 1:
The patent inverts the traditional fastening approach by making the female nut rotatable instead of the male nut. The female nut includes a rotation prevention protrusion that engages with a groove in the male nut, allowing the female nut to rotate during fastening while preventing the male nut from rotating, thereby eliminating leakage while maintaining operational ease
2Manufacturing precision
If I-marking is required for fastening, then the fastening process can be controlled, but the device complexity increases
Solution Approach 1:
The patent uses color-coded indicators instead of I-marking to show fastening status. The female nut includes a first indicator showing a first color when not fully fastened and a second indicator showing a second color when fully fastened, providing visual feedback without requiring complex marking systems
3Adaptability or versatility
If the female nut is made to rotate, then standard VCR-type fastening can be achieved, but additional structural requirements are needed
Solution Approach 1:
The patent achieves VCR-type fastening by making the female nut rotatable with a rotation prevention protrusion that engages with the male nut, inverting the traditional rotation mechanism while maintaining compatibility with standard VCR fastening procedures
Solution Approach 2:
The rotation prevention protrusion and groove automatically engage during the fastening process, allowing the female nut to rotate while preventing male nut rotation without requiring additional control mechanisms or complex structural arrangements
Data Source
AI summary
A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present disclosure includes: a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows; a male fitting member connected with the female fitting member by being connected to a second pipe opposite to the first pipe; a female nut member supporting the female fitting member therein; a male nut member supporting the male fitting member therein and configured to connect the female fitting member and the male fitting member by being coupled to the female nut member; and a gasket member supported on a side by the female fitting member, supported on another side by the male fitting member, and configured to prevent leakage of gas from the female fitting member and the male fitting member.


