Gas Float Workpiece Conveyance for Laser Annealing Uniformity
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Solution Overview
Problem
Existing workpiece conveyance systems face challenges in maintaining uniformity during laser annealing treatments due to the structure and shape of the substrate, leading to irradiation unevenness and heat conduction issues, especially with larger substrates requiring multiple grasping sections.
Innovation Solution
A workpiece conveyance apparatus with a gas flotation system and movable holding sections that adjust their holding force and position along the conveyance path, allowing for non-contact release and re-engagement during treatment regions to prevent irradiation unevenness, utilizing multiple holding sections along the axis and varying holding forces to maintain substrate stability and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a stage is used to move the semiconductor substrate, then the substrate can be conveyed, but the stage structure causes treatment unevenness due to pins, grooves, and non-flat surfaces affecting laser irradiation uniformity
Solution Approach 1:
The patent uses a gas flotation section to float the substrate on a gas cushion, eliminating contact with mechanical stages. The substrate is conveyed while floating on gas, preventing treatment unevenness caused by stage surface irregularities such as pins and grooves.
Solution Approach 2:
The patent extracts the substrate from contact with the mechanical stage structure by using gas flotation. The substrate is held and conveyed without touching the stage surface, removing the source of treatment unevenness.
2Stability of the object's composition
If multiple grasping sections are used to hold large substrates, then substrate stability is improved, but treatment unevenness occurs due to ununiform reflection and heat conduction from the grasping section surfaces
Solution Approach 1:
The patent uses gas flotation to support the substrate without mechanical contact. Multiple gas flotation sections can be used along the conveyance path to maintain substrate stability while avoiding the reflection and heat conduction issues caused by grasping section surfaces.
Solution Approach 2:
The patent introduces gas as an intermediary between the substrate and any supporting structures. The gas cushion mediates the support function without causing the harmful effects of direct mechanical contact, such as ununiform heat conduction and laser reflection.
3Productivity
If the substrate is gas-floated and held by grasping sections, then conveyance efficiency is improved, but treatment unevenness occurs due to the surface shape of grasping sections affecting laser reflection and heat conduction
Solution Approach 1:
The patent uses gas flotation for substrate conveyance, maintaining high productivity while eliminating treatment unevenness. The gas flotation system allows efficient substrate handling without the surface shape issues of mechanical grasping sections.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures uniform treatment of workpieces by minimizing the influence of substrate structure and shape on laser irradiation, maintaining stable posture and reducing treatment unevenness, thereby enhancing production efficiency and quality.
Implementation Method 1
a gas flotation section that gas-floats the workpiece over the conveyance path
Data Source
AI summary
A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.