Substrate Processing Gas Flow Rate Control Relay

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Solution Overview

Problem

The accuracy of gas flow rate measurement in substrate processing systems is compromised due to delays in controlling the secondary valve, which affects the determination of the rate of pressure rise and subsequently the calculated flow rate.

Innovation Solution

A substrate processing system with a relay-controlled wiring system allows the secondary valve to be instantaneously closed by the second controller, eliminating delays and enabling accurate measurement of the pressure rise time, thereby improving the accuracy of gas flow rate determination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the secondary valve is controlled by the first controller through communication, then the system integration is improved, but the response time increases due to communication delays

Engineering Contradiction:

Improvesystem integrationVSAvoidresponse time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

A relay is introduced as an intermediary device between the first controller and the secondary valve. The relay receives the control signal from the first controller and immediately activates the secondary valve without waiting for communication response, thereby eliminating communication delays while maintaining system integration

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The relay is pre-configured and connected to the secondary valve's activation mechanism. When the first controller sends a signal, the relay is already in position to immediately close the secondary valve, performing the critical action without delay

Inventive Principle:

Principle #10Preliminary action

2Extent of automation

If the communication-based control is used, then the centralized control is improved, but the measurement precision deteriorates due to control delays

Engineering Contradiction:

Improvecentralized controlVSAvoidflow rate measurement accuracy

Core Design Contradiction:

Extent of automationVSMeasurement precision

Solution Approach 1:

The relay acts as a mediator that decouples the centralized control system from the critical timing operation. It receives the control command from the first controller and executes the valve closure instantaneously, preserving measurement precision while maintaining automated control

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The communication-based electronic control is supplemented with an electro-mechanical relay system that provides immediate physical response. This substitution of control mechanism eliminates the time lag inherent in communication protocols

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If the time length measurement includes communication delay, then the control simplicity is improved, but the calculation accuracy worsens

Engineering Contradiction:

Improvecontrol simplicityVSAvoidflow rate calculation accuracy

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The relay intermediary eliminates the need for complex delay compensation calculations. By providing immediate response, it simplifies the control logic while ensuring that the measured time length accurately reflects only the physical process, not communication overhead

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures precise determination of the gas flow rate by eliminating control delays and accurately measuring the pressure rise time, enhancing the overall precision of substrate processing.

Implementation Method 1

The one or more pressure sensors are configured to measure a pressure within the third gas flow channel

Methodology Applied

Scientific EffectPressure measurement:

Implementation Method 2

The temperature sensor is configured to measure a temperature within the third gas flow channel

Methodology Applied

Scientific EffectTemperature measurement:

Implementation Method 3

The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay

Methodology Applied

Scientific EffectRelay switching: Relay

Data Source

PatentUS10871786B2Substrate processing system and method of determining flow rate of gas

Publication Date: 2020.12.22 TOKYO ELECTRON LTD

AI summary

A substrate processing system includes a substrate processing apparatus and a measurement apparatus. The substrate processing apparatus includes a gas supply unit. The gas supply unit includes a flow rate controller and a secondary valve. The secondary valve is connected to a secondary side of the flow rate controller. The secondary valve is opened when a voltage is output from a first controller of the substrate processing system through a wiring. The measurement apparatus measures the flow rate of the gas output from the flow rate controller according to the instruction from the first controller. The measurement apparatus includes a second controller. The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay.