Gas Flow Distribution Receptacle for Plasma Stripping

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Solution Overview

Problem

Conventional plasma generators using fluorine-comprising gases suffer from rapid etching of components, leading to increased maintenance costs due to chemical reactions with quartz materials, which limits the useful life of gas flow distribution receptacles and tubes.

Innovation Solution

The design incorporates a gas flow distribution receptacle with specific ring configurations of openings to control gas flow and create a flow curtain, preventing reactive radicals from depositing on the receptacle surface, and using materials like quartz, aluminum/sapphire, and ceramic to enhance component durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If fluorine-comprising gases are used for plasma stripping, then effective organic matter removal is achieved, but rapid etching of quartz components occurs leading to increased maintenance costs

Engineering Contradiction:

Improveplasma stripping effectivenessVSAvoidcomponent useful life

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

A flow distribution receptacle made of fluorine-resistant material (such as aluminum oxide, aluminum nitride, or ceramic) is introduced as an intermediary component between the fluorine-comprising gas and the quartz tube. This receptacle serves as a protective barrier that prevents direct contact between reactive fluorine radicals and the quartz material, thereby eliminating etching while allowing the plasma stripping process to proceed effectively

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If conventional quartz gas flow distribution receptacles are used, then gas flow distribution is achieved, but chemical reactions with fluorine radicals cause erosion and etching

Engineering Contradiction:

Improvegas flow distributionVSAvoidchemical etching

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The material parameter of the gas flow distribution receptacle is changed from quartz (SiO2) to fluorine-resistant materials such as aluminum oxide (Al2O3), aluminum nitride (AlN), or ceramic. This material substitution fundamentally changes the chemical resistance properties, making the receptacle immune to fluorine radical etching while maintaining its gas flow distribution function

Inventive Principle:

Principle #35Parameter changes

3Reliability

If frequent replacement of eroded components is performed, then system reliability is maintained, but maintenance costs increase significantly

Engineering Contradiction:

Improvesystem operational reliabilityVSAvoidmaintenance time and cost

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The invention replaces expensive quartz components with more cost-effective fluorine-resistant materials that have significantly extended service lives. The flow distribution receptacle and tube are designed to withstand prolonged exposure to fluorine-comprising gases without degradation, reducing the frequency of replacements from monthly to annually or longer, thereby reducing both direct replacement costs and indirect maintenance downtime

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach minimizes etching of system components, extends the useful life of gas flow distribution receptacles and tubes, and reduces maintenance costs by protecting them from reactive fluorine radicals during plasma stripping processes.

Implementation Method 1

the coil is energized and creates an electric field across the plasma chamber. As the processing gas flows through the electric field within the plasma chamber, a portion of the processing gas becomes ionized and forms plasma

Methodology Applied

Scientific EffectIonization: Ionisation

Implementation Method 2

The plasma dissociates another portion of the processing gas and transforms it into reactive radicals

Methodology Applied

Scientific EffectPlasma dissociation: Photodissociation

Implementation Method 3

Methodology Applied

Scientific EffectFluid flow:

Data Source

PatentUS9209000B2Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes

Publication Date: 2015.12.08 NOVELLUS SYSTEMS INC

AI summary

Systems, system components, and methods for plasma stripping are provided. In an embodiment, a gas flow distribution receptacle may have a rounded section that includes an inner surface defining a reception cavity, an outer surface forming an enclosed end, and a centerpoint on the outer surface having a longitudinal axis extending therethrough and through the reception cavity. First and second rings of openings provide flow communication with the plasma chamber. The second ring of openings are disposed between the first ring and the centerpoint, and each opening of the second ring of openings extends between the inner and outer surfaces at a second angle relative to the longitudinal axis that is less than the first angle and has a diameter that is substantially identical to a diameter of an adjacent opening and smaller than the diameters of an opening of the first ring of openings.