Gas Flow Simulation via Color-Coded Piping Visualization
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Solution Overview
Problem
Conventional substrate processing techniques face challenges in accurately simulating gas flow paths and determining the correct state of gas flow diagrams, particularly in semiconductor manufacturing, due to difficulties in visualizing gas direction and mixing within complex piping systems.
Innovation Solution
A substrate processing apparatus and simulation method that includes an information acquisition unit, path determination unit, and simulation unit to simulate gas flow paths by assigning colors based on gas type, allowing for detailed visualization of gas flow and identification of potential hazardous mixtures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If gas flow paths are displayed only by color classification, then the path and range of gas flow can be known, but it is difficult to accurately determine the direction of gas flow or the way of joining or mixing different types of gases
Solution Approach 1:
The patent applies color coding to different gas types in the piping system, where each gas type is assigned a specific color. This allows operators to quickly identify which gas is flowing through which pipe while maintaining visual simplicity. The color information is overlaid on the piping diagram to provide both simplicity and detailed information about gas flow paths, directions, and mixing states.
2Productivity
If a table format recipe is used, then process data can be organized, but it is hard to read and difficult to determine whether the recipe provides a correct state of gas flow diagram
Solution Approach 1:
The patent creates a visual copy or simulation of the actual gas flow system by overlaying simulated gas flow paths on the real piping diagram. This simulation replicates the gas flow states defined in the recipe data, allowing operators to visually verify whether the recipe correctly represents the intended gas flow configuration. The visual simulation serves as a readable representation that complements the tabular recipe data.
3Device complexity
If conventional simulation methods are used, then a basic gas flow path can be displayed, but real-time simulation of the operating process cannot be achieved
Solution Approach 1:
The patent implements a feedback mechanism where the simulation apparatus continuously updates the gas flow simulation based on real-time operating data from the substrate processing apparatus. The simulation reflects the actual gas flow states as they occur during processing, allowing for real-time monitoring and verification. This feedback loop ensures the simulation remains synchronized with the actual process state without requiring complex real-time computational models.
Data Source
AI summary
A substrate processing apparatus includes a substrate processing apparatus, including: a substrate processing chamber configured to accommodate a substrate and process the substrate; a piping coupled to the substrate processing chamber to allow a gas for processing the substrate to be introduced therethrough; and a simulation apparatus configured to simulate a path in which the gas for processing the substrate flows through the piping. The simulation apparatus includes: an information acquisition unit configured to acquire gas flow information defined by an operation mode in which the substrate is processed; a path determination unit configured to determine a gas path based on the gas flow information acquired by the information acquisition unit; and a simulation unit configured to simulate a flow of the gas by putting a color defined according to the type of gas on the gas path determined by the path determination unit.