Gas Flow Inlet Guide Mesh for Parasitic Plasma Blocking
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Solution Overview
Problem
Existing gas distribution assemblies in process chambers suffer from parasitic plasma penetration, leading to deposition and substrate contamination.
Innovation Solution
A gas flow inlet guide with a plasma blocker, comprising a mesh material, is integrated to prevent parasitic plasma penetration while allowing gas flow, using mesh openings sized based on plasma characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a gas distribution assembly is used to deliver process gas, then gas delivery function is achieved, but parasitic plasma penetrates and causes deposition
Solution Approach 1:
A plasma blocker is introduced as an intermediary component between the process chamber and the gas distribution assembly. The plasma blocker selectively blocks parasitic plasma while allowing process gas to pass through, preventing plasma penetration into the gas distribution assembly and subsequent deposition of particles that would contaminate substrates.
Solution Approach 2:
The plasma blocker utilizes a porous or mesh structure with specific opening sizes. The porous material allows gas molecules to pass through while blocking larger plasma species, achieving selective filtration based on the size difference between gas molecules and plasma particles.
2Object-affected harmful factors
If a plasma blocker with mesh material is used to prevent plasma penetration, then plasma blocking is achieved, but gas flow uniformity must be maintained
Solution Approach 1:
The gas distribution assembly incorporates locally optimized features including flow guides at specific locations, varying mesh densities in different regions of the plasma blocker, and strategically positioned openings. These local quality variations ensure uniform gas flow distribution across the substrate while maintaining effective plasma blocking throughout the assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces substrate contamination by minimizing parasitic plasma deposition within the gas flow guide, ensuring uniform gas delivery and efficient purge processes.
Implementation Method 1
Parasitic plasma from a plasma source or from a process volume of the process chamber can penetrate gas distribution assemblies and cause deposition therein
Implementation Method 2
a plasma blocker disposed thereover... comprising a mesh material, is integrated to prevent parasitic plasma penetration while allowing gas flow, using mesh openings sized based on plasma characteristics
Data Source
AI summary
Embodiments described herein provide a chamber having a gas flow inlet guide to uniformly deliver process gas. The gas flow inlet guide having a flow guide bottom plate having an opening. A top plate is disposed over the flow guide bottom plate and a plasma blocker is disposed over the opening. The plasma blocker includes one or more apertures sized based one or more of a plasma density, an electron temperature, an ion temperature, or a characteristic of a process gas.