Gas Injection Module Buffering for Uniform Semiconductor Substrate Processing
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Solution Overview
Problem
Existing gas distribution apparatuses in semiconductor manufacturing face challenges in achieving uniform gas injection into gas passages and cleaning of gas passages and distribution holes due to permanent sealing and non-uniform gas distribution.
Innovation Solution
The apparatus includes a body with gas passages and distribution holes connected via a gas injection module with first and second buffering spaces to ensure uniform gas injection and easy cleaning, featuring detachable sealing for improved gas distribution and maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If both ends of gas passages are sealed by welding, then the structural integrity is improved, but the ease of cleaning gas passages deteriorates
Solution Approach 1:
The gas distribution apparatus is divided into separable components: the body with gas passages and distribution holes, and the gas injection module with injection holes. This segmentation allows the gas injection module to be detached for cleaning while maintaining the structural integrity of the body, resolving the contradiction between welded sealing and ease of cleaning.
2Device complexity
If gas is injected directly into gas passages without buffering, then the device complexity is reduced, but the uniformity of gas injection deteriorates
Solution Approach 1:
Gas buffering spaces are introduced as intermediary components between the gas supply and the gas passages. These buffering spaces ensure uniform gas distribution to multiple gas passages, improving injection uniformity while accepting the additional complexity as a necessary trade-off for precise manufacturing requirements.
3Reliability
If gas distribution holes are permanently sealed, then the reliability of gas distribution is improved, but the ease of cleaning distribution holes deteriorates
Solution Approach 1:
The sealing mechanism is made dynamic and reversible through detachable connections between the gas injection module and the body. This allows the system to switch between sealed operational state (ensuring reliability) and open maintenance state (enabling easy cleaning of distribution holes), resolving the contradiction between permanent sealing and ease of cleaning.
Data Source
AI summary
Disclosed is an apparatus for distributing gas which is capable of uniformly injecting processing gas into a plurality of gas passages being communicated with a plurality of gas distribution holes, and an apparatus for processing substrate including the same, wherein the apparatus for distributing gas may include a body including a plurality of gas passages connected with a plurality of gas distribution holes for distributing processing gas; and at least one gas injection module connected with at least one lateral surface of the body and respectively communicated with the plurality of gas passages, wherein the gas injection module firstly buffers the processing gas supplied from the external, secondly buffers the firstly buffered processing gas, and injects the buffered processing gas into the plurality of gas passages.