Gas Injection Nozzle for Lithographic Conduit Vibration Damping
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Solution Overview
Problem
Conventional pumps in lithographic apparatuses experience vibrations due to liquid compression, leading to pressure peaks and waves, which negatively impact projection accuracy, particularly in immersion systems with complex geometries.
Innovation Solution
A conduit system with a gas injection nozzle is introduced to absorb pressure peaks and waves in the liquid or liquid-gas mixture, reducing vibrations by injecting gas into the flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional pumps are used to pump liquid in the conduit system, then the liquid can be transported, but vibrations and pressure peaks occur due to liquid compression
Solution Approach 1:
A damping element is introduced as an intermediary component in the conduit system between the pump and the immersion liquid. This damping element absorbs pressure peaks and vibrations generated by the pump, preventing them from propagating through the liquid to the projection system, thereby maintaining imaging accuracy while allowing continuous liquid transport
Solution Approach 2:
The damping element changes the physical parameters of the liquid flow by absorbing pressure fluctuations and vibrations. This modifies the pressure and vibration characteristics of the liquid without affecting its fundamental pumping and transport function, resolving the contradiction between reliable liquid transport and harmful vibrations
2Manufacturing precision
If the substrate is submersed in a large body of liquid for immersion lithography, then imaging of smaller features is enabled, but additional powerful motors are required and turbulence occurs
Solution Approach 1:
Instead of submering the entire substrate in a large body of liquid, the invention applies immersion liquid locally only in the immediate vicinity of the projection system where it is needed for high-resolution imaging. This localized approach maintains the refractive index benefit for imaging precision while dramatically reducing the mass of liquid that must be accelerated, thereby reducing motor power requirements and minimizing turbulence
3Quantity of substance
If liquid is supplied along the direction of movement of the substrate, then localized area coverage is achieved, but the system complexity increases with multiple inlets and outlets
Solution Approach 1:
The damping element serves multiple functions simultaneously: it dampens vibrations and pressure peaks from the pump, allows liquid flow in the direction of substrate movement for localized coverage, and maintains system simplicity by being a single integrated component rather than requiring multiple separate inlets and outlets. This multi-functionality resolves the contradiction between achieving localized liquid coverage and maintaining system simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The gas injection significantly reduces vibrations in the conduit system and pump components, enhancing the imaging accuracy of the lithographic apparatus by mitigating the effects of pressure waves and peaks.
Implementation Method 1
a gas injection nozzle configured to introduce a gas in the liquid or liquid-gas mixture to at least partially absorb pressure peaks or waves in the liquid or liquid-gas mixture
Data Source
AI summary
A conduit system for a lithographic apparatus is disclosed, the conduit system including a conduit configured to guide a liquid or liquid-gas mixture, and a gas injection nozzle configured to introduce a gas in the liquid or liquid-gas mixture to at least partially absorb pressure peaks or waves in the liquid or liquid-gas mixture. In an embodiment, the gas injection nozzle may be arranged in a pump of the conduit system. The pump further includes a pump inlet, a pump outlet and a pump chamber between the pump inlet and the pump outlet arranged for compression of the liquid or liquid-gas mixture.