Gas Injector Support Bolt for Uniform Large-Substrate Processing
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Solution Overview
Problem
Large-area gas injectors used in substrate processing apparatuses sag due to high temperatures, and existing support mechanisms are inadequate, leading to uneven gas distribution and reduced stability.
Innovation Solution
A substrate processing apparatus with a sag prevention bolt coupled to the gas injector, featuring multiple gas paths and a cooling mechanism, which supports the gas injector and ensures uniform gas distribution across a large-area substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a shaft is installed near injection holes to prevent sagging, then the gas injector is supported, but the shaft size is small and cannot sufficiently support the gas injector
Solution Approach 1:
The support structure is divided into multiple segments: multiple bolts are distributed around the gas injector perimeter, each bolt having its own path for gas flow. This segmentation allows each bolt to provide localized support while collectively ensuring uniform support across the entire gas injector surface, preventing both sagging and overheating.
Solution Approach 2:
Different regions of the gas injector are supported by multiple bolts positioned at different locations. Each bolt provides localized support and cooling to its specific region, ensuring that the entire gas injector maintains uniform temperature and shape without excessive shaft diameter anywhere.
2Reliability
If multiple shafts are installed to support the gas injector, then support capability is improved, but device complexity increases
Solution Approach 1:
Each bolt serves multiple functions simultaneously: it provides mechanical support to prevent sagging, acts as a thermal management element through its gas flow path, and maintains the structural integrity of the gas injector. This multi-functionality eliminates the need for separate support shafts and cooling systems.
Solution Approach 2:
The support function and gas injection function are merged into a single component - the bolt with integrated gas path. Instead of having separate support shafts and gas injection holes, the bolt structure combines both functions, simplifying the overall device while maintaining support capability.
3Reliability
If a shaft is coupled to the gas injector for support, then sagging is prevented, but the coupled portion does not inject gas
Solution Approach 1:
The bolt is designed as a multi-functional component that simultaneously provides structural support and gas injection capability. The gas path is integrated directly through the bolt structure, allowing the same component that prevents sagging to also deliver gas to the substrate, eliminating the functional separation in conventional designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents sagging of the gas injector, maintaining stability and uniformity of gas injection, thereby ensuring consistent processing quality on large-area substrates.
Implementation Method 1
the sag prevention bolt may include a cooling means
Data Source
AI summary
The present inventive concept relates to a substrate processing device, comprising: a chamber; a chamber lid that supports the upper portion of the chamber; a susceptor that is installed to face the chamber lid and supports a substrate; a gas ejection unit that ejects a plurality of gases; and an anti-sag bolt that is installed in the chamber lid and can be combined with the gas injection unit, wherein the anti-sag bolt includes a plurality of flow paths through which a plurality of gases can flow.