Reaction Tube Gas Injector Support to Prevent Tilting
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Solution Overview
Problem
In batch-type substrate processing apparatuses, gas injectors often tilt or fall due to their weight, disrupting the uniform gas supply and processing efficiency within the processing container.
Innovation Solution
The gas injectors are supported by a protruding support portion that contacts the injector, maintaining a stable position by ensuring the horizontal distance from the injector's gravity center to the container's center is longer than the distance from the support point to the center, preventing tilting and falling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas injector is supplied into processing container using gas injector passing through processing container, then gas supply function is achieved, but gas injector tilts or falls due to its weight
Solution Approach 1:
A support portion protruding from the processing container serves as an intermediary structure to bear the weight of the gas injector. The support portion extends from the inner wall of the processing container toward the center, providing a stable contact point that prevents the gas injector from tilting or falling, thus resolving the contradiction between achieving gas supply function and maintaining stability against weight.
Solution Approach 2:
The support structure is segmented into a protruding support portion integrated with the processing container wall and a separate gas injector component. This segmentation allows the support portion to independently bear the load while the gas injector maintains its gas supply function, separating the weight-bearing function from the gas delivery function.
2Reliability
If gas injector is supported by protruding support portion, then stability is improved, but device complexity increases
Solution Approach 1:
The support portion is merged with the processing container wall as an integrated structural feature rather than a separate component. The support portion protrudes from the inner wall and is formed as part of the container structure, combining the container's structural function with the support function, thereby improving stability without significantly increasing device complexity.
Data Source
AI summary
A substrate processing apparatus includes: a first reaction tube of a vertical shape; and a gas injector configured to supply a gas to an interior of the first reaction tube, wherein the gas injector has a first tubular portion extending horizontally to pass through a sidewall of the first reaction tube, the first reaction tube has a support portion protruding toward a center of the first reaction tube below the first tubular portion, and the support portion is in contact with the gas injector to support the gas injector.