Gas Laser Oscillator Dynamic Evacuation Control

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Solution Overview

Problem

Conventional gas exchange methods for sealed gas laser oscillators require lengthy evacuation processes due to regular interval-based gas exchanges, regardless of the time since the last exchange and exposure to atmospheric conditions, leading to inefficient operation.

Innovation Solution

A sealed gas laser oscillator system that determines a target pressure based on the interval between gas exchanges and the leakage rate of impurities, allowing for partial evacuation to a higher pressure threshold, thereby shortening the gas exchange time without compromising performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If evacuation is performed from set pressure to 0.1 to 0.01 Torrs at regular intervals, then gas purity is maintained, but gas exchange time becomes excessively long

Engineering Contradiction:
Improvegas purityVSAvoidgas exchange time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies dynamics by making the evacuation target pressure variable rather than fixed. The control unit dynamically adjusts the evacuation target pressure based on the actual impurity gas pressure measured in the housing. When impurity pressure is low, evacuation stops at a higher pressure (reducing time); when impurity pressure is high, evacuation continues to lower pressure (maintaining purity). This dynamic adjustment resolves the contradiction between maintaining gas purity and reducing exchange time.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the parameter of evacuation target pressure from a fixed value (0.1 to 0.01 Torrs) to a variable value determined by actual impurity levels. The control unit monitors impurity gas pressure and adjusts the evacuation termination pressure accordingly. This parameter change allows the system to adapt to different impurity conditions, achieving both purity maintenance and time reduction.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If evacuation is performed to very low pressure (0.1 to 0.01 Torrs), then impurity gas is thoroughly removed, but evacuation time increases significantly

Engineering Contradiction:
Improveimpurity removal efficiencyVSAvoidoperational efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent implements feedback by using the impurity gas pressure sensor to continuously monitor the actual impurity level in the housing. The control unit receives this feedback and adjusts the evacuation process accordingly. When the sensor detects that impurity pressure has reached an acceptable level, the control unit terminates evacuation early, preventing unnecessary extension to very low pressures. This feedback mechanism ensures adequate impurity removal while avoiding excessive evacuation time that would reduce productivity.

Inventive Principle:
Principle #23Feedback

3Ease of operation

If gas exchange is performed at fixed intervals regardless of actual conditions, then maintenance schedule is simple, but evacuation time is wasted when impurity levels are already low

Engineering Contradiction:
Improvemaintenance schedulingVSAvoidunnecessary evacuation time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent applies self-service by enabling the system to automatically determine when gas exchange is actually needed based on real-time impurity pressure measurements. The control unit monitors impurity levels and autonomously decides whether evacuation should proceed or can be skipped/shortened. This self-service capability eliminates the need for rigid fixed-interval schedules, allowing the system to adapt to actual conditions and avoid unnecessary evacuation time while maintaining simple operation through automated control.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the time required for gas exchange by optimizing the evacuation process, allowing the laser gas oscillator to operate efficiently with reduced downtime and maintaining performance.

Implementation Method 1

a vacuum pump that is connected to the airtight vessel and performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure

Methodology Applied
Scientific EffectEvacuation: Vacuum

Implementation Method 2

a laser gas supply source that supplies a laser gas to the airtight vessel

Methodology Applied
Scientific EffectGas supply:

Implementation Method 3

performs laser oscillation in a state where the airtight vessel is filled with the laser gas

Methodology Applied
Scientific EffectLaser oscillation: Laser

Data Source

PatentUS8576891B2Gas laser oscillator and gas exchange method for gas laser oscillator
Publication Date: 2013.11.05 MITSUBISHI ELECTRIC CORP
  • US8576891B2 patent drawing
  • US8576891B2 patent drawing
  • US8576891B2 patent drawing

AI summary

The sealed gas laser oscillator that includes the airtight vessel, the laser gas supply source that supplies a laser gas to the airtight vessel, and the vacuum pump that performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure every predetermined interval between laser gas exchanges and is connected to the airtight vessel, and that performs laser oscillation in a state where the airtight vessel is filled with the laser gas. The gas laser oscillator includes a unit that determines the target reached pressure on the basis of the interval between laser gas exchanges, a leakage rate of an impurity gas from the outside to the airtight vessel after evacuation, and an allowable impurity gas pressure at which the gas laser oscillator is capable of being operated.