Gas Laser Chamber Electrode Support for Uniform Primary Discharge

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing gas laser apparatuses face challenges in maintaining uniform primary discharge across the discharge electrodes, leading to non-uniform wear of the first discharge electrode and a reduced service life of the chamber apparatus.

Innovation Solution

The chamber apparatus is designed with a support member made of an insulator, which prevents electrical continuity between the second discharge electrode and the chamber body, thereby enhancing the longitudinal uniformity of the return current and improving the uniformity of the primary discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the second discharge electrode is electrically connected to the chamber body via a conductive support member, then the structural support is simplified, but the uniformity of primary discharge deteriorates and the service life of the chamber apparatus decreases

Engineering Contradiction:
Improvestructural support complexityVSAvoiduniformity of primary discharge and service life
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent introduces an insulating support member as an intermediary between the second discharge electrode and the chamber body. This insulating member prevents direct electrical contact while providing mechanical support, thereby maintaining discharge uniformity and extending service life without complicating the structural support system.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If a line narrowing module is added to the laser resonator to narrow the spectral linewidth, then the chromatic aberrations are reduced, but the device complexity increases

Engineering Contradiction:
Improvespectral linewidth and chromatic aberration controlVSAvoidlaser resonator structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent introduces an insulating support member as an intermediary between the second discharge electrode and the chamber body. This insulating member prevents direct electrical contact while providing mechanical support, thereby maintaining discharge uniformity and extending service life without complicating the structural support system.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the uniformity of the primary discharge, reduces non-uniform wear of the discharge electrodes, and extends the service life of the chamber apparatus.

Implementation Method 1

a support member fixed to the chamber body and supporting the second discharge electrode, the second discharge electrode and the chamber body being not electrically continuous with each other via the support member

Methodology Applied
Scientific EffectElectrical insulation: Electrical Resistance

Implementation Method 2

a first discharge electrode disposed in an internal space of the chamber body and having a longitudinal direction aligned with an optical axis of the laser light; a second discharge electrode so disposed in the internal space that the second discharge electrode faces the first discharge electrode

Methodology Applied
Scientific EffectGas discharge: Townsend Discharge

Data Source

PatentUS20250293478A1Chamber apparatus for laser, gas laser apparatus, and electronic device manufacturing method
Publication Date: 2025.09.18 GIGAPHOTON INC
  • US20250293478A1 patent drawing
  • US20250293478A1 patent drawing
  • US20250293478A1 patent drawing

AI summary

A chamber apparatus for a laser configured to output laser light, the chamber apparatus including: a chamber; a first discharge electrode disposed in an internal space of the chamber and having a longitudinal direction aligned with an optical axis of the laser light; a second discharge electrode so disposed in the internal space that the second discharge electrode faces the first discharge electrode and has a longitudinal direction aligned with the optical axis of the laser light; a return member electrically connected to the chamber and further electrically connected to the second discharge electrode over a length from one end to the other end thereof in the longitudinal direction; and a support member fixed to the chamber and supporting the second discharge electrode, the second discharge electrode and the chamber being not electrically continuous with each other via the support member.