Gas Laser Chamber Preionization Gap for Stable Main Discharge

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Solution Overview

Problem

Gas laser devices, such as ArF and KrF excimer lasers, suffer from chromatic aberration due to large spectral line widths, which can decrease resolution in semiconductor exposure applications, and require line narrowing modules to mitigate this issue, but these modules can lead to unstable main discharge and reduced preionization intensity.

Innovation Solution

A chamber design for gas laser devices with a preionization electrode configuration that includes a dielectric pipe and preionization electrodes with a controlled gap between 0 mm and 0.9 mm, enhancing preionization intensity and stability by increasing the light emission area and ultraviolet light output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a line narrowing module is provided in the laser resonator to narrow the spectral line width, then the chromatic aberration is reduced, but the main discharge becomes unstable and the preionization intensity decreases

Engineering Contradiction:

Improvespectral line widthVSAvoidmain discharge stability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The preionization electrode is divided into multiple sections along the longitudinal direction, with each section having an independent gap distance to the dielectric pipe. This segmentation allows different gap distances in different regions, optimizing both the preionization intensity and main discharge stability while accommodating the spectral line width requirements without compromising overall system reliability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the preionization electrode are designed with different gap distances to the dielectric pipe, creating local variations in preionization intensity. This local quality approach ensures that each region contributes optimally to the overall discharge stability and spectral characteristics

Inventive Principle:

Principle #3Local quality

2Illumination intensity

If the gap distance between the preionization electrode and dielectric pipe is increased to enhance preionization intensity, then the ultraviolet light output increases, but the device complexity increases

Engineering Contradiction:

Improveultraviolet light outputVSAvoidpreionization electrode structure

Core Design Contradiction:

Illumination intensityVSDevice complexity

Solution Approach 1:

The gap distance between the preionization electrode and dielectric pipe is optimized within a specific range (0.1-0.9 mm) to achieve the desired ultraviolet light output. By controlling this parameter within defined boundaries, the system achieves high illumination intensity without requiring overly complex structural modifications

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The chamber design improves preionization intensity and stability of the laser light output, ensuring consistent performance for semiconductor exposure applications by optimizing the preionization process.

Implementation Method 1

a first preionization electrode arranged beside one side of the first main electrode. The first preionization electrode includes a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along a longitudinal direction of the first dielectric pipe, and a first preionization outer electrode extending along the longitudinal direction of the first dielectric pipe

Methodology Applied

Scientific EffectElectrical discharge: Electric Arc

Implementation Method 2

a first preionization inner electrode arranged in the first dielectric pipe and extending along a longitudinal direction of the first dielectric pipe, and a first preionization outer electrode extending along the longitudinal direction of the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe

Methodology Applied

Scientific EffectCorona discharge: Corona Discharge

Data Source

PatentUS20240405496A1Chamber for gas laser device, gas laser device, and electronic device manufacturing method

Publication Date: 2024.12.05 GIGAPHOTON INC

AI summary

A chamber for a gas laser device includes a first main electrode and a second main electrode arranged along a predetermined direction as being apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber and transmitting light from the internal space, and a first preionization electrode arranged beside one side of the first main electrode. Here, the first preionization electrode includes a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along the first dielectric pipe, and a first preionization outer electrode extending along the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe. At least a part of the first gap is larger than 0 mm and equal to or smaller than 0.9 mm.