Perpendicular Gas Line Matrix Layout for Flexible Manifold Routing
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Solution Overview
Problem
The complexity of semiconductor equipment gas line systems arises from the need to route various source vessels and process gases to a reaction chamber through a valve manifold with multiple ports, leading to a chaotic system with numerous unique gas lines and heater jackets.
Innovation Solution
A gas line matrix and interchange assembly are introduced, featuring a first plurality of gas lines with ends aligning on perpendicular axes, allowing for efficient routing and connection of gas lines through a system of sections and connectors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple unique gas lines are used to route different source vessels to different valve manifold ports, then routing flexibility is improved, but system complexity increases
Solution Approach 1:
The patent implements a universal gas line configuration where a standardized set of gas lines with perpendicular alignments can serve multiple source vessels and valve manifold ports through different combination routes. Instead of requiring a unique gas line for each vessel-port pairing, the same gas line infrastructure supports various routing configurations, reducing the total number of gas lines needed while maintaining full routing flexibility.
Solution Approach 2:
The patent merges multiple potential gas line pathways into a unified perpendicular alignment system. By organizing gas lines along two perpendicular axes, multiple source vessels can share common gas line segments, and multiple valve manifold ports can be accessed through different combinations of the same gas line set, thereby consolidating the system structure.
2Reliability
If heated gas lines are used to maintain gas temperature, then gas flow reliability is improved, but the number of heater jackets and system complexity increase
Solution Approach 1:
The perpendicular gas line alignment system creates universal heating zones where a single heater jacket can effectively heat multiple gas line segments that share common spatial regions. Gas lines passing through or near the same heater location can be simultaneously heated, allowing one heater to serve multiple routing paths and reducing the total number of heater jackets required.
Solution Approach 2:
The patent combines multiple gas line heating requirements into shared heating zones along the perpendicular axes. By positioning heater jackets at strategic locations where multiple gas lines converge or pass through, the system achieves reliable temperature maintenance across all gas lines using fewer heater units.
Data Source
AI summary
Various embodiments of the present technology may provide a gas line matrix and interchange assembly. The wherein the interchange assembly includes a first plurality of gas lines, wherein each gas line comprises a first end and a second end, and wherein the first ends of the first plurality of gas lines align on a first axis and the second ends of the first plurality of gas lines aligns on a second axis, and the first axis is perpendicular to the second axis.