Gas-Liquid Separator Bubble Elimination via Water Spray

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Solution Overview

Problem

Conventional gas-liquid separators in polishing apparatuses face issues with bubble formation and leakage due to the use of foamable liquids, leading to potential clogging of exhaust lines, especially when treating gas-liquid two-phase flows containing polishing liquids and gases like nitrogen.

Innovation Solution

A gas-liquid separator design incorporating a spray nozzle to eliminate bubbles by spraying pure water onto the collected liquid in the separation tank, combined with a mist trap in the exhaust pipe to capture any mist, ensuring effective separation and discharge of gas and liquid phases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional gas-liquid separator is used to separate gas-liquid two-phase flow, then gas and liquid can be separated and discharged, but bubbles generated in the liquid may leak into the exhaust pipe and cause clogging

Engineering Contradiction:
Improveseparation effectivenessVSAvoidbubble leakage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A water spray system is introduced as an intermediary mechanism between the collected liquid and the exhaust system. The spray nozzle sprays water onto bubbles in the liquid, causing them to coalesce and be eliminated before the liquid can enter the exhaust pipe, thus preventing bubble leakage without compromising separation effectiveness

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The water spray system converts the harmful bubbles into beneficial coalesced liquid droplets. By spraying water onto bubbles, the system causes them to merge with the water spray and be eliminated, transforming the bubble leakage problem into an effective bubble removal mechanism

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Productivity

If foamable liquid is used in polishing, then polishing performance is improved, but bubble formation increases and causes exhaust line clogging

Engineering Contradiction:
Improvepolishing performanceVSAvoidbubble formation
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The water spray system acts as an intermediary that intercepts bubbles generated by foamable liquid before they can escape into the exhaust system. By continuously spraying water onto the liquid in the separation tank, the system prevents bubble formation and eliminates them through coalescence

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The spray nozzle operates continuously to maintain a constant water spray onto the liquid surface, ensuring continuous bubble elimination. This continuous action prevents bubble accumulation and ensures that any bubbles formed by the foamable liquid are immediately addressed

Inventive Principle:
Principle #20Continuity of useful action

3Reliability

If the gas discharge outlet is positioned high to prevent liquid flow, then gas discharge is ensured, but bubbles generated at the bottom may still reach the exhaust pipe

Engineering Contradiction:
Improvegas discharge reliabilityVSAvoidbubble escape
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The water spray system serves as an intermediary barrier between the liquid at the bottom and the exhaust system. Even though the gas discharge outlet is positioned high, the water spray continuously eliminates bubbles in the liquid, preventing them from reaching the exhaust pipe regardless of outlet position

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents bubble leakage into exhaust lines by uniformly spraying pure water to eliminate bubbles in the liquid and captures mist in the exhaust gas, ensuring reliable separation and discharge of gas and liquid phases, thus preventing clogging and ensuring efficient operation of the polishing apparatus.

Implementation Method 1

a spray nozzle configured to spray pure water toward a liquid that has been collected on a bottom of the gas-liquid separation tank

Methodology Applied
Scientific EffectBubble elimination through water spray: Bubble

Implementation Method 2

A gas-liquid two-phase flow, recovered in the drain receiver 102, moves through the gas-liquid introduction pipe 104 and is introduced into the interior of the gas-liquid separation tank 100. A liquid, which has been separated from the gas-liquid two-phase flow and has accumulated on the bottom of the gas-liquid separation tank 100

Methodology Applied
Scientific EffectGravitational separation: Gravitation

Implementation Method 3

an exhaust pipe communicating with a gas discharge outlet provided in a side wall of the gas-liquid separation tank, the gas discharge outlet being located above a lower end of the gas-liquid introduction pipe

Methodology Applied
Scientific EffectMist condensation: Condensation

Data Source

PatentUS9616360B2Gas-liquid separator and polishing apparatus
Publication Date: 2017.04.11 EBARA CORP
  • US9616360B2 patent drawing
  • US9616360B2 patent drawing
  • US9616360B2 patent drawing

AI summary

A gas-liquid separator includes: a gas-liquid separation tank; a gas-liquid introduction pipe configured to introduce a gas-liquid two-phase flow into the gas-liquid separation tank, the gas-liquid introduction pipe extending in the gas-liquid separation tank; a spray nozzle configured to spray pure water toward a liquid that has been collected on a bottom of the gas-liquid separation tank; a drain pipe communicating with a liquid discharge outlet provided in the bottom of the gas-liquid separation tank; and an exhaust pipe communicating with a gas discharge outlet provided in a side wall of the gas-liquid separation tank. The gas discharge outlet is located above a lower end of the gas-liquid introduction pipe.