Gas Mixing Apparatus for Clean Room Filter Inspection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing inspection technologies for filter efficiency in clean rooms are not suitable as they use gases with higher particle concentrations than those found in typical clean room environments, leading to inaccurate results.
Innovation Solution
A gas mixing apparatus that dilutes gases to match environmental conditions, comprising a chamber, filter, gas transmitting unit, and porous layer, connected to a sampling system with upstream and downstream sampling units and a control unit to measure particle concentrations, allowing for accurate assessment of filter efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional inspection methods with high particle concentration gas are used, then inspection can be performed according to standard protocols, but the inspection results do not reflect real clean room conditions
Solution Approach 1:
The patent changes the particle concentration parameter of the inspection gas to match clean room conditions. By controlling the particle concentration in the mixed gas to be within the range of clean room environments (typically 10-100 particles/L), the inspection results accurately reflect real clean room filter performance while maintaining adaptability to actual operating conditions
2Reliability
If gas with particle concentration matching clean room environment is used, then inspection results reflect real conditions, but it requires complex gas mixing to achieve appropriate concentration
Solution Approach 1:
The patent introduces a mixing chamber as an intermediary device that combines clean air (low particle concentration) with particle-laden air (high particle concentration) in controlled proportions. This intermediary mixing system achieves the desired particle concentration range for clean room simulation without requiring direct manipulation of high-concentration particle sources, thereby balancing measurement accuracy with device complexity
3Quantity of substance
If high particle concentration gas is used for inspection, then sufficient particles are available for measurement, but the gas does not represent clean room conditions
Solution Approach 1:
The patent applies partial action by using only the necessary amount of particle-laden air to achieve the target particle concentration range for clean rooms. Instead of using high particle concentration gas that would provide excessive particles, the system carefully controls the mixing ratio to achieve just the right concentration (10-100 particles/L), ensuring both sufficient particles for measurement and representativeness of clean room conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides a practical means to assess filter efficiency by adjusting gas concentrations to match clean room conditions, ensuring accurate and reliable particle filtering efficiency measurements.
Implementation Method 1
An environmental gas outside the chamber is filtered and becomes a clean gas after flowing through the filter into the chamber
Implementation Method 2
the gas to be mixed is mixed with the clean gas and then leaves the chamber through the porous layer
Data Source
AI summary
A gas mixing apparatus including a chamber, a filter, a gas transmitting unit and a porous layer is provided. The chamber includes a gas inlet and a gas outlet. The filter, which has at least one opening, is disposed at the gas outlet of the chamber. An environmental gas outside the chamber is filtered and becomes a clean gas after flowing through the filter into the chamber. The gas transmitting unit is connected to the opening of the filter to transmit a gas to be mixed into the chamber through the opening. The porous layer is disposed at the gas outlet. The gas to be mixed is mixed with the clean gas and leaves the chamber through the porous layer.