Gas Mixture Supply Line Positioning for Semiconductor Condensation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional gas mixture supplying apparatuses for semiconductor manufacturing require increased power consumption due to heating of pipelines and supply lines to prevent condensation of liquid source gases, leading to inefficiencies in energy usage.
Innovation Solution
The liquid source gas is supplied from a gas supply line positioned closer to the gas outlet than the typical gas, with the liquid source gas being vaporized and supplied downstream of a filter, reducing the need for extensive heating and minimizing power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the common pipeline and gas mixture supply line are heated to high temperature to prevent condensation of liquid source gas, then condensation is prevented, but power consumption is increased
Solution Approach 1:
The liquid source gas is supplied from a gas supply line positioned closer to the gas outlet than the typical gas, so that the liquid source gas is introduced into the common pipeline after the filter. This preliminary positioning reduces the length of pipeline requiring heating, thereby preventing condensation while reducing power consumption.
Solution Approach 2:
The invention applies heating locally only to the necessary portion of the pipeline where liquid source gas flows, rather than heating the entire common pipeline and gas mixture supply line. By positioning the liquid source gas supply line closer to the outlet, heating is concentrated only on the critical section, reducing overall energy consumption while maintaining reliability.
2Reliability
If a filter is provided in the common pipeline to remove particles, then particle removal is achieved, but gas mixture pressure is increased and condensation likelihood is raised
Solution Approach 1:
The invention uses the spatial arrangement of gas supply lines as an intermediary solution. By positioning the liquid source gas supply line closer to the gas outlet and downstream of the filter, the system mediates between the need for particle removal (filter) and pressure management, reducing the pressure increase effect on liquid source gas while maintaining filtration effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces power consumption by minimizing the heating required to prevent condensation of the liquid source gas, achieving energy savings while maintaining effective gas mixture delivery to semiconductor processing chambers.
Implementation Method 1
a liquid source gas vaporized by heating a liquid source material supplied from a liquid source material supply unit by a vaporizing unit
Implementation Method 2
the common pipeline (manifold), the gas mixture supply line and so forth are conventionally heated to a high temperature by a heater, thus preventing the condensation of the liquid source gas
Implementation Method 3
a filter is provided in the common pipeline (manifold) or the gas mixture supply line to remove particles present in the gas mixture
Data Source
AI summary
A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline into a region where the gas mixture is used through a gas mixture supply line. When a typical gas supplied in a gaseous state from a gas supply unit and a liquid source gas vaporized by heating a liquid source material supplied from a liquid source material supply unit by a vaporizing unit are supplied simultaneously, the liquid source gas is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for the typical gas, and the liquid source gas is supplied to a downstream side of a filter for removing particles in the typical gas.