Gas Nozzle With Angled Openings Suppressing Return Flows
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Solution Overview
Problem
In semiconductor device manufacturing, it is challenging to ensure even flow of processing gases over substrates due to return flows generated by conventional gas nozzles, which affect film thickness uniformity and quality.
Innovation Solution
The use of a gas nozzle configuration with first and second openings arranged in a direction parallel to the substrate surface, where the second openings inject gas at a predetermined angle relative to the first openings, suppressing return flows and ensuring uniform gas distribution by dispersing gas flow across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional nozzle supplies processing gas to a substrate, then the gas supply structure is simple, but return flows occur and film thickness uniformity deteriorates
Solution Approach 1:
The nozzle is divided into multiple gas supply openings (first openings and second openings) with different orientations. The first openings supply gas substantially perpendicular to the substrate, while the second openings supply gas at an oblique angle. This segmentation of gas supply directions eliminates return flows and achieves uniform film thickness without requiring complex external flow control mechanisms.
Solution Approach 2:
Different regions of the nozzle provide different gas supply characteristics. The first openings provide vertical gas flow for base coverage, while the second openings provide oblique gas flow for edge coverage and return flow suppression. This local differentiation of gas supply quality ensures uniform film formation across the entire substrate surface.
2Manufacturing precision
If inert gas is supplied to make processing gas flow evenly, then gas distribution is improved, but the system complexity increases and even flow is still difficult to achieve
Solution Approach 1:
The gas supply function is segmented into two distinct opening types within a single nozzle structure. The first openings handle primary vertical gas supply, while the second openings handle oblique gas supply for flow control. This integrated segmentation eliminates the need for separate inert gas supply systems while achieving even gas distribution.
Solution Approach 2:
The functions of processing gas supply and flow direction control are merged into a single nozzle structure with multiple opening types. The second openings serve dual purposes: supplying processing gas and controlling flow direction to prevent return flows. This merging simplifies the overall gas supply system while maintaining even gas distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents return flows, improving in-plane film thickness uniformity and enhancing the evenness of gas flow over the substrate, as demonstrated by simulation results showing reduced gas partial pressure differences and absence of return flows.
Implementation Method 1
a gas supplied from the first opening is supplied toward a center of the substrate, a gas supplied from the second opening is supplied toward a peripheral edge of the substrate
Implementation Method 2
simulation results showing reduced gas partial pressure differences
Data Source
AI summary
There is provided a technique that includes a first opening and a second opening which supply gases to a process chamber in which a substrate is arranged, and is configured such that: the first opening and the second opening are arranged in a direction parallel to a surface of the substrate, a gas supplied from the first opening is supplied toward a center of the substrate, a gas supplied from the second opening is supplied toward a peripheral edge of the substrate, and a direction of the gas supplied from the second opening forms a predetermined angle with respect to a direction of the gas supplied from the first opening.