Gas Nozzle Tip-Hole Layout for Uniform Substrate Processing
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Solution Overview
Problem
Existing gas nozzles in substrate processing apparatuses face challenges in efficiently emitting reaction gases, leading to gas retention and potential deactivation, which affects the uniformity and quality of film deposition processes.
Innovation Solution
The design of a gas nozzle with a larger opening area tip hole oriented opposite to the first gas holes, facilitating efficient emission of reaction gases and reducing retention, thereby suppressing deactivation and improving flow velocity and concentration uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional gas nozzle with uniform small holes is used, then the device complexity is low, but the gas emission efficiency is poor leading to gas retention and deactivation
Solution Approach 1:
The gas nozzle implements local quality by differentiating the hole characteristics along its length. The tip portion features a large opening area to enhance gas emission efficiency and prevent gas retention, while the intermediate portion maintains smaller holes for controlled gas distribution. This localized differentiation optimizes each section's function: the tip prioritizes emission efficiency while other sections maintain structural simplicity.
2Reliability
If the second gas hole at the tip has a larger opening area, then the gas retention is reduced and deactivation is suppressed, but the manufacturing precision requirements increase
Solution Approach 1:
The invention applies parameter changes by varying the opening area parameter along the nozzle length. The tip portion has a deliberately larger opening area parameter compared to the intermediate portion, creating a gradient structure. This parameter variation optimizes gas emission reliability at the tip while the gradual transition reduces abrupt changes that would otherwise demand extreme manufacturing precision.
3Speed
If gas is emitted through multiple small holes, then the gas distribution is uniform, but the gas flow velocity is insufficient leading to deactivation
Solution Approach 1:
The gas nozzle applies segmentation by dividing the gas emission function into two distinct sections: the tip portion with a large opening for high-velocity gas ejection, and the intermediate portion with multiple smaller holes for distributed gas emission. This segmentation allows the tip to prioritize flow velocity while the intermediate section maintains gas distribution uniformity, collectively preventing deactivation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the emission of reaction gases, reducing gas retention and deactivation, leading to improved film deposition quality and uniformity in substrate processing.
Implementation Method 1
a second gas hole provided at a tip of the gas nozzle and oriented toward a side opposite to a side in which the plurality of first gas holes are provided in a plan view from the longitudinal direction
Data Source
AI summary
A gas nozzle extending vertically inward of an inner wall of a processing container having a substantially cylindrical shape, includes a plurality of first gas holes provided at intervals in a longitudinal direction; and a second gas hole provided at a tip of the gas nozzle and oriented toward a side opposite to a side in which the plurality of first gas holes are provided in a plan view from the longitudinal direction, wherein the second gas hole has an opening area larger than an opening area of each of the first gas holes.