Gas Panel Inert Gas Distribution for Reduced Exhaust

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Solution Overview

Problem

Gas distribution apparatuses, such as gas panels, face challenges in reducing operating costs and energy consumption while minimizing environmental impact, particularly due to high safety exhaust requirements that contribute significantly to CO2 footprints and operational expenses.

Innovation Solution

The implementation of a gas panel apparatus and method that involves distributing inert gases within the panel to reduce leaks, monitoring for leaks and pressure changes, and adjusting the inert gas distribution and exhaust rates accordingly, along with enhanced sealing techniques to minimize oxygen concentration and reduce flammability risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high exhaust rates are used to ensure safety, then safety requirements are met, but energy consumption and operating costs increase significantly

Engineering Contradiction:
ImprovesafetyVSAvoidenergy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The exhaust pump operates dynamically with variable speed control, adjusting exhaust rate based on real-time leak detection feedback. The system transitions between low-speed normal operation and high-speed leak response modes, optimizing energy consumption while maintaining safety requirements.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

A feedback control system uses leak sensors to monitor gas panel integrity continuously. When leaks are detected, the system automatically increases exhaust pump speed and inert gas flow rate. When no leaks are present, the system reduces exhaust requirements, thereby lowering energy consumption while maintaining safety.

Inventive Principle:
Principle #23Feedback

2Reliability

If high exhaust rates are maintained continuously, then safety is ensured, but CO2 footprint and environmental impact increase

Engineering Contradiction:
ImprovesafetyVSAvoidCO2 footprint
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The system implements periodic leak monitoring and conditional exhaust activation rather than continuous high-rate exhaust. Exhaust pump operates at high speed only during detected leak events, while maintaining low-speed or idle operation during normal conditions, reducing overall environmental impact.

Inventive Principle:
Principle #19Periodic action

3Reliability

If inert gas distribution is increased to reduce leaks, then safety and leak prevention improve, but gas consumption and operating costs increase

Engineering Contradiction:
Improveleak preventionVSAvoidgas consumption
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

Inert gas flow rate is dynamically adjusted based on leak detection feedback. The system increases inert gas distribution only when leaks are detected, and reduces flow rate to minimum levels during normal operation, optimizing gas consumption while maintaining leak prevention capability.

Inventive Principle:
Principle #15Dynamics

4Reliability

If continuous monitoring and adjustment systems are implemented, then safety and leak response improve, but device complexity increases

Engineering Contradiction:
Improveleak detection capabilityVSAvoidsystem complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The gas panel system performs self-diagnosis and self-correction through automated leak detection and inert gas flow adjustment. The control system automatically responds to sensor inputs without requiring external intervention, maintaining safety while managing complexity through automation.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces exhaust requirements, lowers operating costs, and improves eco-efficiency by minimizing the need for high-energy exhaust pumps and reducing the risk of flammable gas ignition, thereby decreasing the environmental impact of gas distribution systems.

Implementation Method 1

distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present

Methodology Applied
Scientific EffectDilution:

Implementation Method 2

exhausting the gases out of the gas panel

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS10460960B2Gas panel apparatus and method for reducing exhaust requirements
Publication Date: 2019.10.29 APPLIED MATERIALS INC
  • US10460960B2 patent drawing
  • US10460960B2 patent drawing
  • US10460960B2 patent drawing

AI summary

Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.