Gas Pattern Screen Highlighting for Accurate Flow Rate Editing
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Solution Overview
Problem
In substrate processing apparatuses, users often mistakenly set gas flow rates for incorrect gas lines due to a lack of clear identification on the recipe edit screen, leading to potential processing errors.
Innovation Solution
The apparatus displays a recipe edit screen with a parameter setting region for gas flow rate and a gas pattern screen that clearly specifies the flow rate controller associated with the set gas flow rate, preventing incorrect settings by visually indicating the correct gas line for editing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a user sets gas flow rate on the recipe edit screen, then the gas flow rate can be configured, but the user may set the gas flow rate for a gas line other than the desired gas line by mistake
Solution Approach 1:
The gas line whose flow rate is being set is highlighted with a different color (e.g., yellow background) on the gas pattern screen to visually distinguish it from other gas lines. This color indication allows users to confirm they are editing the correct gas line before finalizing the setting, preventing accidental misconfiguration.
Solution Approach 2:
The gas pattern screen acts as an intermediary between the recipe edit screen and the actual gas flow rate setting. When a user initiates a flow rate setting on the recipe edit screen, the system automatically displays the corresponding gas line information on the gas pattern screen, providing an additional confirmation step that mediates between the user's intent and the final setting action.
2Adaptability or versatility
If multiple gas lines are displayed on the recipe edit screen, then all gas lines can be accessed, but clear identification of the target gas line becomes difficult
Solution Approach 1:
Different visual states are applied to gas lines based on their selection status. The target gas line for editing is displayed with a distinctive color or background shade, while other gas lines maintain a standard display appearance. This visual differentiation maintains information about all gas lines while clearly highlighting the active selection.
Solution Approach 2:
The visual indication is applied locally only to the specific gas line that is currently selected for editing, rather than uniformly to all gas lines. This allows the interface to maintain its general layout and information density while providing targeted visual feedback at the specific location where user action is needed.
Data Source
AI summary
According to some embodiments of the present disclosure, a gas line whose gas flow rate is to be edited by a user can be confirmed. There is provided a technique that includes: (a) displaying, on a recipe edit screen, a parameter setting region configured to set control parameters including a gas flow rate of a flow rate controller and a gas pattern screen configured to set an opening/closing state of a valve; (b) editing the recipe on the recipe edit screen; and (c) processing a substrate by performing the recipe edited in (b). When the gas flow rate of the flow rate controller is set on the parameter setting region, a flow rate controller on the gas pattern screen in association with the flow rate controller whose gas flow rate is set on the parameter setting region is clearly specified.