Gas Supply Pipe Blockage Detection in Substrate Processing
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Solution Overview
Problem
In substrate processing apparatuses, identifying and resolving blockages in gas supply pipes is time-consuming, leading to reduced manufacturing throughput due to the inability to pinpoint blocked areas without pressure sensors, resulting in extensive downtime and costly replacements.
Innovation Solution
Incorporating pressure detectors between valves in the gas supply system and a controller to determine blockage levels, allowing for targeted maintenance and reducing downtime by identifying and addressing blockages efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If pressure detectors are installed in the gas supply system to identify blockages, then the time required for eliminating blockages is reduced, but the device complexity increases
Solution Approach 1:
Pressure detectors are installed as intermediary components in the gas supply system to detect blockages. These detectors measure pressure at specific locations and provide information about blockage conditions without requiring direct intervention or complex diagnostic procedures. The pressure detectors act as mediators between the gas flow and the control system, enabling automatic detection and response to blockages.
Solution Approach 2:
The control unit receives pressure detection results from multiple pressure detectors and automatically determines blockage locations and severity. This feedback mechanism allows the system to continuously monitor gas supply conditions and respond to blockages in real-time, reducing downtime by eliminating the need for manual inspection and diagnosis.
2Productivity
If multiple pressure detectors are provided between valves to determine blockage levels, then manufacturing throughput is improved, but the cost of the gas supply system increases
Solution Approach 1:
The gas supply system is segmented into multiple sections by dividing the gas supply pipe into several segments with valves at boundaries. Pressure detectors are strategically placed at specific segments to monitor blockages in different regions. This segmentation allows the system to identify blockage locations precisely and isolate affected segments, maintaining high manufacturing throughput by enabling targeted maintenance rather than system-wide shutdowns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly shortens the time required to eliminate blockages and enhances manufacturing throughput by enabling precise identification and management of blockages in gas supply pipes, reducing the need for extensive replacements and minimizing downtime.
Implementation Method 1
a plurality of pressure detectors provided between the plurality of valves
Implementation Method 2
A gas supply pipe is configured to be heated by a heater or the like so that a precursor does not solidify and adhere to the gas supply pipe
Data Source
AI summary
There is provided a technique that includes: a reaction container configured to accommodate a substrate; an exhaust pipe configured to exhaust an atmosphere inside the reaction container; a gas supplier configured to supply a process gas to the substrate; a gas supply system including at least one gas supply pipe kept in fluid communication with the gas supplier and configured to supply the process gas, a plurality of valves provided on the at least one gas supply pipe, and a plurality of pressure detectors provided between the plurality of valves; and a controller configured to be capable of determining a blockage level of the at least one gas supply pipe based on at least one pressure among measurement results of the plurality of pressure detectors.