Gas Pipe Heating Uniformity via High-Conductivity Sensor Mediator

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Solution Overview

Problem

Existing pipe heating devices in substrate processing apparatuses face challenges in maintaining thermal uniformity and preventing re-solidification of gases, leading to particle generation due to incomplete heating and temperature discrepancies along the gas pipes.

Innovation Solution

A pipe heating device is designed with a ribbon heater covering the gas pipe except for the sensor region, and a heat conducting member with higher thermal conductivity than the pipe is attached between the pipe and the sensor, ensuring uniform heat distribution and preventing re-solidification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a sensor is installed in the gas pipe to monitor temperature, then temperature measurement capability is improved, but thermal uniformity deteriorates due to the sensor acting as a thermal barrier

Engineering Contradiction:

Improvetemperature measurement capabilityVSAvoidthermal uniformity

Core Design Contradiction:

Measurement precisionVSStability of the object's composition

Solution Approach 1:

A heat conducting member with higher thermal conductivity than the gas pipe is introduced as an intermediary between the sensor and the pipe. This mediator bridges the thermal gap created by the sensor installation, allowing heat to flow more efficiently from the pipe through the sensor region, thereby restoring thermal uniformity while preserving the sensor's measurement capability

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The thermal conductivity parameter is enhanced by introducing a heat conducting member with superior thermal properties compared to the original pipe material. This parameter change compensates for the thermal disruption caused by sensor installation, maintaining consistent temperature distribution along the pipe

Inventive Principle:

Principle #35Parameter changes

2Temperature

If a ribbon heater is used to heat the gas pipe, then heating function is improved, but thermal uniformity deteriorates due to temperature discrepancies along the pipe

Engineering Contradiction:

Improveheating functionVSAvoidthermal uniformity

Core Design Contradiction:

TemperatureVSStability of the object's composition

Solution Approach 1:

The heat conducting member acts as a thermal mediator that distributes heat more evenly along the pipe section where the sensor is installed. By positioning this high-conductivity component at the thermal disruption point, it facilitates uniform heat distribution and eliminates temperature discrepancies that would otherwise occur with ribbon heater alone

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Rather than modifying the entire pipe system, the heat conducting member is strategically placed only at the sensor installation region where thermal disruption occurs. This localized intervention addresses the specific thermal uniformity problem without requiring system-wide modifications

Inventive Principle:

Principle #3Local quality

3Object-affected harmful factors

If the gas pipe is heated to prevent condensation, then condensation prevention is improved, but particle generation occurs due to incomplete heating and temperature variations

Engineering Contradiction:

Improvecondensation preventionVSAvoidparticle generation

Core Design Contradiction:

Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The heat conducting member serves as a thermal mediator that ensures complete and uniform heating of the pipe, particularly in the sensor region. This eliminates cold spots where condensation and subsequent particle generation would occur, thereby preventing both condensation and the harmful particle byproduct

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves thermal uniformity along the gas pipes, preventing particle generation by maintaining consistent temperatures and ensuring efficient heating, even when the sensor is installed, thereby enhancing the substrate processing apparatus's performance.

Implementation Method 1

a heat conducting member attached between an outer peripheral surface of the gas pipe and the sensor and formed of a material having a higher thermal conductivity than the gas pipe

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a heating part having a heat generation portion arranged so as to cover the gas pipe except for a region of the gas pipe where the sensor is installed

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS11506321B2Pipe heating device and substrate processing apparatus

Publication Date: 2022.11.22 TOKYO ELECTRON LTD

AI summary

There is provided a pipe heating device, including; a sensor installed in a gas pipe; a heating part having a heat generation portion arranged so as to cover the gas pipe except for a region of the gas pipe where the sensor is installed; and a heat conducting member attached between an outer peripheral surface of the gas pipe and the sensor and formed of a material having a higher thermal conductivity than the gas pipe.