Gas Pipe Temperature Sensing to Resist Karman Vortex Damage
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Solution Overview
Problem
Existing semiconductor manufacturing apparatuses face challenges in accurately measuring and controlling the temperature of gases introduced into processing containers due to the occurrence of Karman vortices, which can damage temperature sensors and impair their dynamic characteristics.
Innovation Solution
The apparatus incorporates a temperature sensor with a unique configuration that is supported at two or more points within the gas introduction pipe, preventing resonance and damage from Karman vortices, and a heater to control the gas temperature directly, ensuring accurate measurement and control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is installed in the gas introduction pipe to measure gas temperature, then temperature measurement capability is improved, but the sensor is damaged by Karman vortices and resonance
Solution Approach 1:
The gas introduction pipe is segmented into multiple sections along the gas flow direction, with temperature sensors installed at different positions (first temperature sensor in the first section, second temperature sensor in the second section). This segmentation allows for distributed temperature measurement while reducing the impact of Karman vortices on individual sensors by spacing them apart along the flow path.
Solution Approach 2:
A heating section with a heater is introduced as an intermediary element between the gas source and the processing container. This heater pre-heats the gas before it reaches the processing container, allowing for indirect temperature control and measurement without exposing sensors directly to the harsh flow conditions that cause Karman vortices. The heater acts as a mediator that enables temperature management while protecting the sensing elements.
2Stability of the object's composition
If temperature control is implemented in the gas introduction pipe, then process stability is improved, but device complexity increases
Solution Approach 1:
The system implements feedback control by using temperature sensors to measure the actual gas temperature in the gas introduction pipe and using this measurement to control the heater. The control unit receives temperature data from the sensors and adjusts the heater power accordingly to maintain the desired gas temperature, creating a closed-loop feedback system that improves process stability while managing complexity through automated control.
Solution Approach 2:
The heater in the heating section performs preliminary heating of the gas before it enters the processing container. This preliminary action allows temperature control to be established upstream, stabilizing the gas temperature before it reaches the critical processing zone, thereby improving process stability without requiring complex control mechanisms within the processing container itself.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for precise temperature measurement and control of gases, enhancing process stability and reducing heat load on the processing container, while maintaining sensor integrity and responsiveness.
Implementation Method 1
a temperature sensor provided in the gas introduction pipe and configured to measure a temperature of a gas in the gas introduction pipe
Implementation Method 2
a heater to control the gas temperature directly
Data Source
AI summary
A semiconductor manufacturing apparatus includes: a gas introduction pipe connected to a processing container of the semiconductor manufacturing apparatus in order to introduce a gas into the processing container; and a temperature sensor provided in the gas introduction pipe in order to measure a temperature of a gas in the gas introduction pipe.