Multi-Stage Gas Scrubber Using Bubble-Forming Scrubbing Plates
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Solution Overview
Problem
Existing scrubbing apparatuses in semiconductor manufacturing fail to effectively increase the contact area between the cleaning solution and the gas, limiting the efficiency of pollutant removal.
Innovation Solution
A scrubbing apparatus with a scrubbing chamber divided into sub-spaces by a separating wall, featuring multiple scrubbing plates with penetrating holes and a spray nozzle system that generates bubbles in the cleaning solution to enhance contact area and dissolve impurities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a filler is installed to increase contact area between cleaning solution and exhaust gas, then scrubbing efficiency is improved, but device complexity increases
Solution Approach 1:
The scrubbing chamber is divided into multiple sub-chambers (first sub-chamber, second sub-chamber, third sub-chamber) separated by partition walls. Each sub-chamber contains scrubbing plates with through-holes that segment the gas flow path, creating multiple contact interfaces between gas and cleaning solution without requiring complex filler structures
Solution Approach 2:
Scrubbing plates with through-holes are used instead of traditional fillers. The plates provide structured porous pathways that force gas to pass through and contact the cleaning solution efficiently, achieving high scrubbing efficiency while maintaining simpler device architecture compared to filler-based systems
2Area of stationary object
If spray nozzle is installed to supply water with small particles, then contact area between cleaning solution and gas is increased, but device complexity increases
Solution Approach 1:
The invention transitions from traditional spray nozzle approaches to a multi-dimensional contact system. Gas flows horizontally through scrubbing plates while cleaning solution flows vertically downward, creating three-dimensional contact interfaces across multiple sub-chambers and plates, significantly increasing contact area without complex spray mechanisms
Solution Approach 2:
The system uses hydraulic flow of cleaning solution through defined channels on scrubbing plates combined with pneumatic gas flow through through-holes. This controlled fluid dynamics approach creates efficient contact interfaces without requiring complex spray nozzle systems
3Area of stationary object
If multiple scrubbing plates with holes are used to generate bubbles, then contact area between gas and cleaning solution is increased, but manufacturing precision requirements increase
Solution Approach 1:
The contact area is segmented across multiple scrubbing plates (first, second, third scrubbing plates) with through-holes. Each plate provides discrete contact interfaces, and the segmented approach allows for easier manufacturing and assembly compared to creating precision bubble generation structures in a single component
Solution Approach 2:
The invention changes the approach from precision bubble generation to controlled fluid flow through structured plates. By adjusting flow rates and plate configurations rather than requiring precise hole geometries for bubble formation, the manufacturing precision requirements are reduced while still achieving increased contact area
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The increased contact area between the gas and cleaning solution leads to improved efficiency in dissolving impurities, effectively removing harmful substances from the gas before discharge.
Implementation Method 1
the forming bubbles within the second cleaning solution on the upper surface of the first scrubbing plate as the gas ascends through the plurality of first scrubbing holes
Implementation Method 2
dissolving the impurities at the contact area between the bubbles and the second cleaning solution
Data Source
AI summary
The scrubbing apparatus may comprises a scrubbing chamber defining a scrubbing space, a separating wall dividing the scrubbing space into a first sub-space and a second sub-space, a spray nozzle in the first sub-space to spray a first cleaning solution into the first sub-space, a first scrubbing plate fixed to the separating wall, a cleaning solution supply nozzle supplying a second cleaning solution onto an upper surface of the first scrubbing plate, a cleaning solution storage tank, and a plurality of first scrubbing holes penetrating the first scrubbing plate, wherein a portion of impurities contained in the gas is dissolved into the first cleaning solution in the first sub-space, and another portion of impurities contained in the gas is dissolved into the second cleaning solution on the upper surface of the first scrubbing plate after the gas ascends through the plurality of first scrubbing holes in the second subspace.