Gas Sensor With Crystal And Amorphous Layers For Stable Detection

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Solution Overview

Problem

Existing sensors face challenges in maintaining stable detection characteristics due to interference from unintended elements and require improved sensitivity and stability in detecting gas concentrations.

Innovation Solution

The sensor design includes a first sensor part with a crystal layer and an amorphous intermediate layer, where the crystal layer provides protection and a larger surface area to suppress unintended changes, and a second sensor part with a resistance member featuring a crystalline layer and an amorphous intermediate layer, allowing for stable resistance changes with gas concentration, enhancing sensitivity and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single-layer sensor structure is used, then the device complexity is reduced, but the detection stability deteriorates due to interference from unintended elements

Engineering Contradiction:
Improvesensor structureVSAvoiddetection stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The sensor is divided into multiple functional layers including a first sensor part with a first movable electrode and first counter electrode, and a second sensor part with a second movable electrode and second counter electrode. Each layer performs a specific function in the detection process, allowing the system to maintain simple individual components while achieving stable detection through their coordinated interaction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The sensor employs composite material structures with distinct functional layers, where each layer is made of materials optimized for its specific role. This composite approach enables the sensor to achieve both structural simplicity and detection stability by combining materials with complementary properties rather than using a single complex material system.

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If the sensor surface area is increased to improve detection sensitivity, then the detection precision is improved, but the sensor becomes more susceptible to interference from unintended elements

Engineering Contradiction:
Improvedetection sensitivityVSAvoidinterference from unintended elements
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

Different regions of the sensor are assigned different functional qualities through the layered structure. The first and second sensor parts have distinct local functions that work together to enhance sensitivity while the specific configuration of each layer restricts interference to localized areas, preventing it from affecting the entire sensor uniformly.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The intermediate layers between the sensor parts act as mediators that allow the detection signal to pass through while blocking or filtering out interference from unintended elements. This intermediary structure enables the sensor to maintain high sensitivity to target gases while reducing susceptibility to interfering substances.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If a complex multi-layer structure is used to suppress unintended changes, then the detection stability is improved, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvedetection stabilityVSAvoidlayer alignment
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The multi-layer structure is segmented into modular sensor parts that can be manufactured and assembled separately. This segmentation allows for standardized manufacturing processes for each layer while reducing the cumulative precision requirements compared to creating a single complex integrated structure, as each module can be independently controlled and aligned.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables stable and sensitive detection of gas concentrations by minimizing interference and maintaining consistent sensor characteristics, allowing for effective detection across a wide concentration range.

Implementation Method 1

a resistance member including a second layer and a second intermediate layer located between an insulating member and at least a portion of the second layer... An electrical resistance of the resistance member changes according to a concentration of a gas around the second sensor part

Methodology Applied
Scientific EffectResistive detection: Electrical Resistance

Implementation Method 2

a first sensor part including a first counter electrode, a first movable electrode, a first layer, and a first intermediate layer... A distance between the first counter electrode and the first movable electrode changes according to a concentration of a gas around the first sensor part

Methodology Applied
Scientific EffectCapacitive detection: Capacitance

Data Source

PatentUS11493471B2Sensor
Publication Date: 2022.11.08 KK TOSHIBA
  • US11493471B2 patent drawing
  • US11493471B2 patent drawing
  • US11493471B2 patent drawing

AI summary

According to one embodiment, a sensor includes a first sensor part. The first sensor part includes a first counter electrode, a first movable electrode, a first layer, and a first intermediate layer. The first movable electrode is between the first counter electrode and the first layer. The first intermediate layer is between the first movable electrode and a portion of the first layer. A first gap is located between the first counter electrode and the first movable electrode. A distance between the first counter electrode and the first movable electrode changes according to a concentration of a gas around the first sensor part. The first layer includes a crystal. The first intermediate layer is amorphous, or a crystallinity of the first intermediate layer is less than a crystallinity of the first layer. A width of the first layer is greater than a width of the first intermediate layer.