Gas Sensor Film Layout for Low-Noise Resistive Detection

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Solution Overview

Problem

Existing sensors suffer from noise interference due to electromagnetic coupling between resistance and conductive layers, which degrades the accuracy of gas detection.

Innovation Solution

The sensor design separates the resistance and conductive layers to suppress electromagnetic coupling, using a conductive member to efficiently heat the resistance layer while maintaining a fixed potential, thereby reducing noise and enhancing detection accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the resistance layer and conductive layer are overlapped to improve heating efficiency, then the heating efficiency is improved, but noise interference increases affecting detection accuracy

Engineering Contradiction:
Improveheating efficiencyVSAvoiddetection accuracy
Core Design Contradiction:
Use of energy by moving objectVSMeasurement precision

Solution Approach 1:

The patent divides the conductive layer into multiple separate conductive members positioned at different locations, rather than using a single continuous conductive layer. This segmentation allows the resistance layer to be heated efficiently by the conductive members while minimizing electromagnetic coupling and noise interference between the resistance layer and conductive structures, thereby resolving the contradiction between heating efficiency and detection accuracy.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a dielectric layer as an intermediary between the resistance layer and the conductive members. This dielectric layer acts as a mediator that allows thermal energy transfer from the conductive members to the resistance layer for heating, while simultaneously blocking electromagnetic interference and noise from the conductive members from affecting the resistance layer's electrical properties, thus resolving the contradiction between heating efficiency and detection accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If the resistance layer and conductive layer are overlapped to improve thermal coupling, then thermal coupling is improved, but noise from electrical interference increases

Engineering Contradiction:
Improvethermal couplingVSAvoidnoise from electrical interference
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

The dielectric layer serves as an intermediary that enables thermal coupling between the conductive members and resistance layer while blocking electrical interference. The dielectric material conducts heat from the conductive members to the resistance layer, ensuring uniform temperature distribution for effective gas detection, while its insulating properties prevent electrical noise and interference from the conductive members from affecting the resistance layer's electrical characteristics.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies different properties to different parts of the structure: the dielectric layer provides thermal conductivity in the thermal coupling direction while providing electrical insulation in the electrical interference direction. The conductive members are positioned and sized to provide localized heating at the resistance layer interface, creating uniform temperature distribution without generating widespread electrical interference noise.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If the conductive member potential is not fixed to ground, then flexibility in circuit design is improved, but noise suppression is reduced affecting detection reliability

Engineering Contradiction:
Improvecircuit design flexibilityVSAvoiddetection reliability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The dielectric layer acts as an intermediary that isolates the conductive members from the resistance layer electrically, allowing the conductive members to be grounded for noise suppression while preventing this grounding from directly affecting the resistance layer's electrical characteristics. This enables the system to achieve both noise suppression through grounding and design flexibility through the dielectric isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for accurate detection of gas states with reduced noise, improving the sensor's performance and reliability.

Implementation Method 1

a first electrical resistance of the first resistance layer is configured to change according to a state of a detection target around the first element

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

the first conductive member overlapping the first resistance layer and the first conductive layer in the first direction

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12613207B2Sensor and sensor system
Publication Date: 2026.04.28 KK TOSHIBA
  • US12613207B2 patent drawing
  • US12613207B2 patent drawing
  • US12613207B2 patent drawing

AI summary

According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member. The first resistance layer does not overlap the first conductive layer in a first direction from the first base to the first fixed member. The first conductive member overlaps the first resistance layer and the first conductive layer in the first direction. A first electrical resistance of the first resistance layer changes according to a state of a detection target around the first element.