Slim Gas Sensor Package via Flip Chip Bonding
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Solution Overview
Problem
Conventional gas sensor packages face challenges in miniaturization due to their bulky structure resulting from the use of cap members and mesh-shaped ventilation systems, which increase the size and production costs while limiting integration with semiconductor processes.
Innovation Solution
A slim gas sensor package is achieved by using a flip chip bonding method to mount the gas sensing element directly onto a substrate with a gas inflow hole, eliminating the need for separate cap members and mesh structures, and incorporating metal patterns and filling portions for efficient gas flow and electrical connectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cap member and mesh-shaped member are used to protect the gas sensing material, then the gas sensing element is protected, but the package size increases significantly
Solution Approach 1:
The patent removes the cap member and mesh-shaped member from the package structure, eliminating the need for these protective components while still allowing gas to reach the sensing element through the substrate's gas inflow hole, thereby significantly reducing package size
Solution Approach 2:
The substrate itself acts as a thin film structure that integrates the gas inflow hole directly, replacing the need for separate protective caps and mesh structures while maintaining gas permeability and sensing functionality
2Reliability
If a wire bonding method is used to connect the sensor chip to the electrode part, then electrical connection is achieved, but the entire size of the gas sensing package increases
Solution Approach 1:
The patent combines the gas sensing element, substrate, and electrode connections into a single integrated structure where the sensing element is directly mounted on the substrate with metal patterns, eliminating the need for separate wire bonding processes and reducing overall package size
3Ease of operation
If a separate cap member and mesh-shaped member are provided, then gas ventilation is enabled, but the height of the upper structure increases
Solution Approach 1:
The patent extracts and eliminates the cap member and mesh-shaped member, replacing them with a direct gas inflow hole through the substrate, thereby enabling gas ventilation without increasing the height of the upper structure
Solution Approach 2:
The gas inflow hole is formed through the substrate in a vertical dimension, allowing gas to reach the sensing element directly without requiring additional horizontal space for caps or mesh structures, thus reducing the overall height of the package
Data Source
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AI summary
Provided is a gas sensor package including a first substrate (210) including a gas inflow hole (220), and a gas sensing element (100) mounted to the first substrate (210) and including a gas sensing portion (110) disposed to correspond to the gas inflow hole (220).