Multi-Part Gas Sensor Layout for Concentration and Flow Detection
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Solution Overview
Problem
Existing sensors using MEMS elements face challenges in accurately detecting the concentration and flow rate of multiple types of gases due to limitations in thermal characteristics and detection capabilities.
Innovation Solution
A sensor design incorporating multiple detection parts with varying thermal characteristics, including a first concentration sensor, a second concentration sensor, and a flow rate sensor, each with distinct configurations such as different areas, lengths, widths, thicknesses, materials, and distances, allowing for simultaneous detection of gas concentration and flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple detection parts with different thermal characteristics are incorporated, then measurement precision of gas concentration and flow rate is improved, but device complexity increases
Solution Approach 1:
The sensor is divided into multiple independent detection parts (first detection part, second detection part, third detection part), each with distinct thermal characteristics. The first detection part detects gas concentration, the second detection part detects flow rate, and the third detection part provides reference measurements. This segmentation allows each part to be optimized for its specific function while working together to resolve the technical contradiction by improving measurement precision through specialized detection zones.
Solution Approach 2:
Each detection part is designed with local quality variations - different areas, connection part dimensions, and materials tailored to specific detection needs. The first detection part has a first area and first connection part configuration optimized for concentration detection, while the second detection part has a second area and second connection part configuration optimized for flow rate detection. This local differentiation enables precise measurements without requiring uniform complex structures throughout the entire device.
2Measurement precision
If detection elements with different areas and connection part dimensions are used, then detection accuracy for multiple gas parameters is improved, but manufacturing precision requirements increase
Solution Approach 1:
The invention systematically varies key parameters across detection parts - the first detection element has a first area and first connection part dimensions, while the second detection element has a second area and second connection part dimensions. These parameter changes are designed to create distinct thermal characteristics that enable differentiation between gas concentration and flow rate detection. By deliberately controlling parameter variations rather than requiring uniform precision, the invention manages manufacturing complexity while achieving multi-parameter detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection of gas concentration and flow rate of multiple substances by leveraging the unique thermal characteristics of each detection part, enhancing the overall sensor's performance.
Implementation Method 1
thermal characteristics of each detection part
Implementation Method 2
flow rate of the detection target gas
Data Source
AI summary
According to one embodiment, a sensor includes a base, first to third detection parts. The base includes first to third base regions. The first detection part includes a first detection element. A first gap is provided between the first base region and the first detection element. The second detection part includes a second detection element. A second gap is provided between the second base region and the second detection element. The third detection part includes a third detection element. The third detection element includes a third resistance member, a third other resistance member, and a third conductive member. The third conductive member is between the third resistance member and the third other resistance member. A third gap is provided between the third base region and the third detection element.