Gas Sensor Metal Oxide Semiconductor Stability

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Solution Overview

Problem

Existing gas sensors face limitations such as false alarms due to cross-sensitivity, high manufacturing costs, and impracticality for certain applications due to temperature or humidity requirements.

Innovation Solution

A gas-sensing element comprising a metal oxide semiconductor body with a gas-sensing surface doped with a transition metal and a metal chalcogenide, featuring alternating deposits of the metal oxide semiconductor and the transition metal, which enhances sensitivity and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pellistor sensors are used for gas detection, then they can detect combustible gases, but they are prone to false alarms due to cross-sensitivity

Engineering Contradiction:
Improvedetection accuracyVSAvoidcross-sensitivity
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by creating a heterogeneous sensing surface with distinct functional zones: metal oxide semiconductor regions for primary gas detection and metal chalcogenide regions for selective interference rejection. This spatial differentiation of material properties enables the sensor to distinguish target gases from interfering gases through differential response patterns, thereby resolving the cross-sensitivity issue while maintaining detection capability.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If NDIR sensors are used for low-volume applications, then they can provide accurate detection, but they are difficult and expensive to manufacture to commercial tolerances

Engineering Contradiction:
Improvedetection accuracyVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent employs parameter changes by transitioning from the optical detection mechanism of NDIR sensors to an electrical resistance-based detection mechanism using metal oxide semiconductors. This fundamental parameter change allows the use of simpler, more cost-effective manufacturing processes such as screen printing and sintering, while maintaining detection precision through the enhanced surface area and electron interaction mechanisms of the semiconductor material.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If solid state electrochemical sensors operate at high temperatures (excess of 500°C), then they can utilize solid electrolytes formed from ceramics, but they become impractical for many applications

Engineering Contradiction:
Improvesensor stabilityVSAvoidoperating temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent applies composite materials by combining metal oxide semiconductor with metal chalcogenide in a layered or integrated structure. This composite approach enables the sensor to achieve stable performance at lower operating temperatures by leveraging the complementary properties of both materials: the metal oxide provides primary sensing functionality while the metal chalcogenide enhances selectivity and stabilizes performance without requiring high-temperature operation.

Inventive Principle:
Principle #40Composite materials

4Productivity

If MOS sensors are used for gas detection, then they can detect gas components through resistance change, but they suffer from drift and reduced stability over time

Engineering Contradiction:
Improvedetection sensitivityVSAvoidsensor stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent implements feedback through the interaction between metal oxide semiconductor and metal chalcogenide components, where the metal chalcogenide layer provides a stabilizing influence on the sensing surface. This creates a self-regulating system where the composite structure compensates for drift phenomena by maintaining consistent surface properties and electron interaction characteristics over time, thereby improving long-term stability while preserving detection sensitivity.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the stability and reduces drift in gas sensors, leading to enhanced sensitivity and accuracy in detecting gas components like hydrogen sulfide, while being more practical for various applications.

Implementation Method 1

the metal oxide semiconductor adsorbs atmospheric oxygen at the surface, and this adsorbed oxygen captures free electrons from the metal oxide semiconductor material

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

the gas test component interacts with the adsorbed oxygen, causing it to release free electrons back to the semiconductor material, resulting in a measurable decrease in resistance

Methodology Applied
Scientific EffectElectron transfer:

Implementation Method 3

The gas-sensing surface comprises metal oxide semiconductor of the first metal and a dopant comprising a second metal that is a transition metal... a metal chalcogenide disposed at the gas-sensing surface... enhances sensitivity and stability

Methodology Applied
Scientific EffectCatalysis: Catalysis

Data Source

PatentEP4166940B1Gas sensor, method of making the sensor and method of using the sensor
Publication Date: 2025.04.16 CARRIER CORP
  • EP4166940B1 patent drawingFigure 1~2
  • EP4166940B1 patent drawingFigure 3
  • EP4166940B1 patent drawingFigure 4A~4C

AI summary

A gas-sensing element includes a gas-sensing surface of transition metal-doped metal oxide semiconductor of a first metal over a body of the metal oxide semiconductor. The gas-sensing element also includes an auxiliary component of: a metal chalcogenide disposed at the gas-sensing surface or internally disposed in the gas-sensing element between the body and the gas-sensing surface that stabilizes the second metal at the gas-sensing surface.