Gas Sensor Using Metal Organic Framework for On-Chip Integration
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Solution Overview
Problem
Current gas sensors lack selectivity, dynamic range, and integration level, falling short of requirements in various industrial, medical, and environmental monitoring applications.
Innovation Solution
A fully integrated gas sensor system utilizing metal organic framework materials with on-chip circuitry, including interdigitated electrodes and a monitor module to detect changes in impedance, resistance, or capacitance, and optionally enhanced by a filter layer and energy harvesting for wireless communication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If gas sensors are integrated with electronic circuitry on a single substrate, then device complexity is reduced and manufacturing efficiency is improved, but manufacturing precision and integration difficulty increase
Solution Approach 1:
The patent integrates the gas sensing element, signal conditioning circuitry, analog-to-digital conversion, and wireless communication modules onto a single substrate, creating a fully integrated sensor system that eliminates the need for separate components and reduces assembly complexity
Solution Approach 2:
The sensor substrate is designed to perform multiple functions simultaneously: gas detection, signal processing, data conversion, and wireless transmission, allowing a single integrated device to replace what would traditionally require multiple separate components
2Measurement precision
If metal organic framework materials are used as gas sensitive material, then selectivity and sensitivity are improved, but device complexity and material fabrication difficulty increase
Solution Approach 1:
The patent employs specific metal organic framework materials with tailored pore sizes, surface areas, and chemical functionalities at the sensing layer to selectively detect target gases, optimizing the local properties of the sensing material for enhanced selectivity and sensitivity
Solution Approach 2:
The sensor utilizes composite metal organic framework structures combining organic linkers with metal ions or clusters, creating materials with tunable properties that enhance gas selectivity while maintaining structural stability and facilitating integration with the electronic substrate
3Area of moving object
If interdigitated electrodes and monitor modules are integrated on-chip, then area efficiency is improved, but manufacturing precision requirements increase
Solution Approach 1:
The patent employs interdigitated electrode arrangements where electrodes are stacked in overlapping layers rather than extending in a single plane, effectively increasing the sensing area and electrical field interaction volume without proportionally increasing the device footprint
Solution Approach 2:
The sensor is divided into distinct functional regions on the substrate including separate areas for interdigitated electrodes, monitor modules, signal conditioning circuits, and wireless communication, allowing each segment to be optimized independently while maintaining overall compact integration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides an area-efficient, highly selective, and integrated gas sensing system capable of monitoring multiple gases with improved sensitivity and dynamic range, suitable for diverse applications including environmental monitoring and industrial use.
Implementation Method 1
a first gas sensitive material proximate to the first pair of electrodes, wherein the first gas sensitive material includes a first metal organic framework material
Implementation Method 2
The electronic property of the first gas sensitive material monitored by the monitor module includes one or more of impedance, resistance, or capacitance
Data Source
AI summary
A gas sensor using a metal organic framework material can be fully integrated with related circuitry on a single substrate. In an on-chip application, the gas sensor can result in an area-efficient fully integrated gas sensor solution. In one aspect, a gas sensor can include a first gas sensing region including a first pair of electrodes, and a first gas sensitive material proximate to the first pair of electrodes, wherein the first gas sensitive material includes a first metal organic framework material.