Gas Sensor With Movable Membrane for Thermal Stress Relief
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Solution Overview
Problem
Gas sensors with a solid electrolyte layer are prone to damage due to thermal stress when heated to high temperatures.
Innovation Solution
A gas sensor design featuring a substrate with a cavity and a membrane portion that includes a movable portion with a through-hole, allowing the solid electrolyte layer to displace along the thickness direction, thereby alleviating thermal stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the solid electrolyte layer is heated to high temperature by the microheater, then the gas sensor can operate effectively, but the solid electrolyte layer may be damaged by thermal stress
Solution Approach 1:
The membrane portion is designed to be movable in the thickness direction, allowing it to dynamically adjust its position in response to thermal expansion. This dynamic capability enables the membrane to accommodate thermal stress without causing damage to the solid electrolyte layer, while still maintaining the heating function at high temperatures
2Power
If the solid electrolyte layer is heated to high temperature, then gas detection can be performed, but thermal stress may cause cracking and disconnection
Solution Approach 1:
The movable membrane portion acts as an intermediary element between the heating element and the solid electrolyte layer. It absorbs and accommodates the thermal stress generated during high-temperature operation, preventing this stress from being transmitted to the solid electrolyte layer and causing cracking or disconnection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively reduces the likelihood of solid electrolyte layer cracking and disconnection of wiring due to thermal stress, ensuring reliable operation.
Implementation Method 1
the solid electrolyte layer may be damaged by a thermal stress
Data Source
AI summary
A gas sensor includes: a substrate; an insulating layer arranged over the substrate; and a solid electrolyte layer, wherein the substrate is formed with a cavity that penetrates the substrate in a thickness direction of the substrate, wherein the insulating layer has a peripheral portion arranged over the substrate around the cavity, and a membrane portion which is located over the cavity and is connected to the peripheral portion, wherein the membrane portion includes a movable portion, wherein a through-hole, which penetrates the membrane portion around the movable portion in the thickness direction, is formed such that the movable portion is capable of being displaced along the thickness direction, and wherein the solid electrolyte layer is arranged over the movable portion.