Semiconductor Gas Sensor Protrusion Support for Thermal Durability

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Solution Overview

Problem

Semiconductor gas sensors face durability issues due to thermal stress, leading to non-uniform temperature distribution and resistance variations in the heating electrode, which affects heat transmission to the sensing area.

Innovation Solution

A semiconductor gas sensor design featuring a substrate with a cavity and exposure holes, along with protrusion portions on the insulation layers to prevent membrane sagging, ensuring uniform heat distribution and resistance maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a cavity is formed under the heating electrode to dissipate heat, then thermal durability is improved, but the membrane structure sags due to insufficient support

Engineering Contradiction:

Improvethermal durabilityVSAvoidmembrane structure stability

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The support structure is segmented into multiple protrusion portions distributed around the cavity perimeter, providing localized support points that prevent membrane sagging while maintaining heat dissipation effectiveness

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The support structure extends into a third dimension with protrusion portions rising from the substrate surface, creating a dimensional solution that provides mechanical support without blocking the cavity's thermal function

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Loss of energy

If the membrane sags, then heat dissipation is enhanced, but the heating electrode resistance becomes non-uniform affecting heat transmission

Engineering Contradiction:

Improveheat dissipationVSAvoidheating electrode resistance uniformity

Core Design Contradiction:

Loss of energyVSManufacturing precision

Solution Approach 1:

Protrusion portions are positioned to preemptively counteract membrane sagging before it occurs, maintaining the heating electrode in a planar state with uniform resistance distribution

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

Instead of allowing the membrane to sag for heat dissipation and then correcting the resistance issue, the solution inverts the approach by preventing sagging in the first place through protrusion support, thereby maintaining both heat dissipation and resistance uniformity

Inventive Principle:

Principle #13The other way round (Inversion)

3Temperature

If the membrane sags, then cavity heat dissipation function is improved, but the sensing electrode temperature distribution becomes non-uniform

Engineering Contradiction:

Improveheat dissipation efficiencyVSAvoidsensing electrode temperature distribution

Core Design Contradiction:

TemperatureVSStability of the object's composition

Solution Approach 1:

Multiple protrusion portions are strategically positioned around the cavity to segment the support function, maintaining uniform temperature distribution across the sensing electrode while preserving cavity heat dissipation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Protrusion portions are placed at specific locations around the cavity perimeter where support is most needed, providing localized quality enhancement to prevent sagging without interfering with overall heat dissipation function

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution maintains a constant temperature and uniform resistance in the sensing area, enhancing thermal durability and preventing thermal damage, allowing stable gas detection.

Implementation Method 1

it may be necessary for the heating electrode formed under the detection layer to generate heat to be transmitted to the detection layer

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a semiconductor gas sensor can detect a gas using an oxide semiconductor material having a variable resistance when contacting a particular kind of gas

Methodology Applied

Scientific EffectVariable resistance: Electrical Resistance

Data Source

PatentUS10393689B2Semiconductor gas sensor and method of manufacturing the same

Publication Date: 2019.08.27 DONGBU HITEK CO LTD

AI summary

In embodiments, a semiconductor gas sensor includes a substrate having a cavity, a first insulation layer formed on the substrate, including an exposure hole formed at a position corresponding to the cavity and a peripheral portion of the cavity, a second insulation layer formed on the first insulation layer, covering the exposure hole, a heating electrode formed on the second insulation layer, being formed at a position corresponding to the cavity, a sensing electrode formed over the heating electrode, being electrically insulated from the heating electrode and a detection layer covering the sensing electrode, being capable of having a variable resistance when acting with a predetermined kind of gas.