Photo-acoustic Gas Sensor Reference Path Optimization

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Solution Overview

Problem

Conventional photo-acoustic gas sensors have reference path lengths greater than 0.5 mm, which limits their sensitivity and ability to detect small changes in gas concentrations, such as a 100 ppm change in CO2, requiring improved detector components with reduced reference path lengths to enhance sensitivity.

Innovation Solution

The implementation of a detector component with a reference path structure that reduces the length of the reference path to less than or equal to 0.5 mm, improving the sensitivity of the pressure sensing element to a range of 10 mPa/100 ppm to 40 mPa/100 ppm, achieved through various techniques such as fill materials, pedestal layers, lid structures, and recessed lids within the detector component.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the reference path length is reduced to less than or equal to 0.5 mm, then the sensitivity of the pressure sensing element is improved to detect small gas concentration changes, but the detector component structure becomes more complex requiring fill materials, pedestal layers, lid structures, and recessed lids

Engineering Contradiction:
Improvegas concentration detection sensitivityVSAvoiddetector component structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements nesting by placing the reference path structure inside the detector component housing, with the reference gas confined within a specific volume defined by the housing walls, pedestal layer, and lid structure. The fill material is nested within the reference path volume to control the optical properties. This nested arrangement allows the complex functionality to be contained within a compact structure while maintaining the required sensitivity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent applies local quality by using fill materials with specific optical properties within the reference path volume to control light absorption characteristics. The pedestal layer and recessed lid create localized structural features that precisely control the reference path length. These localized modifications to specific regions of the detector component enable the reduced path length while maintaining overall structural integrity and achieving the desired sensitivity enhancement.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the reference path length is reduced to less than or equal to 0.5 mm, then the pressure change detection capability is enhanced for small gas concentration changes, but the manufacturing precision requirements increase to achieve the desired sensitivity range of 10-40 mPa/100 ppm

Engineering Contradiction:
Improvepressure change detection capabilityVSAvoidreference path length control
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent implements preliminary action by pre-configuring the reference path structure with predetermined dimensions during the manufacturing process. The pedestal layer and recessed lid are designed with specific geometries that establish the reference path length of less than or equal to 0.5 mm before the sensor is assembled. This preliminary structural configuration ensures that the sensitivity falls within the desired 10-40 mPa/100 ppm range without requiring post-manufacturing adjustments, thereby managing precision requirements through design rather than assembly tolerance.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies parameter changes by modifying the physical dimensions of the reference path structure, specifically controlling the path length to be less than or equal to 0.5 mm. By changing this critical geometric parameter, the sensitivity of the pressure sensing element is tuned to achieve the target range of 10-40 mPa/100 ppm for detecting small gas concentration changes. This parameter optimization allows the system to achieve high measurement precision while establishing clear manufacturing specifications.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If the reference path length is reduced to less than or equal to 0.5 mm, then the ability to detect small pressure changes is improved, but the volume of the reference gas chamber is reduced

Engineering Contradiction:
Improvesmall pressure change detectionVSAvoidreference gas chamber volume
Core Design Contradiction:
Measurement precisionVSVolume of stationary object

Solution Approach 1:

The patent applies parameter changes by optimizing the reference path length parameter to be less than or equal to 0.5 mm, which directly enhances the pressure sensing element's ability to detect small pressure changes corresponding to small gas concentration variations. This parameter optimization comes at the cost of reduced reference gas chamber volume, but the design compensates through the use of fill materials and structural features that maximize the utilization of the available volume for optical absorption, thereby achieving high detection precision within the constrained volume.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhancement allows for improved sensitivity and detection of small pressure changes, enhancing the overall performance of the photo-acoustic gas sensor by optimizing the reference path length within the detector component.

Implementation Method 1

a portion of light is absorbed by the gas (if any) along the absorption path, and a portion of the remaining unabsorbed light is absorbed by the reference gas. The reference gas absorbs light in the absorption band

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

a pressure sensing element (e.g., a micro-electro-mechanical systems (MEMS) microphone) within a reference volume (e.g., a hermetic volume) that houses a reference gas

Methodology Applied
Scientific EffectPressure sensing:

Implementation Method 3

the photo-acoustic gas sensor measures the gas concentration based on light absorption (e.g., infrared (IR) absorption). For example, a photo-acoustic gas sensor typically includes an emitter to emit light and a detector to receive the light after propagation of the light on an absorption path

Methodology Applied
Scientific EffectInfrared absorption: Absorption (EM radiation)

Data Source

PatentUS11143626B2Photo-acoustic gas sensor with optimal reference path length
Publication Date: 2021.10.12 INFINEON TECHNOLOGIES AG
  • US11143626B2 patent drawing
  • US11143626B2 patent drawing
  • US11143626B2 patent drawing

AI summary

A photo-acoustic gas sensor may include a detector component. The detector component includes a package that defines a reference volume. The reference volume houses a reference gas. The detector component includes a pressure sensing element to measure an amount of pressure in the reference volume. The amount of pressure in the reference volume depends on absorption of a wavelength of light by the reference gas in the reference volume. A sensitivity of the pressure sensing element when measuring the amount of pressure in the reference volume depends on a length of a reference path associated with the reference volume. The detector component includes a reference path structure that causes the length of the reference path to be less than or equal to 0.5 millimeters.