Gas Sensor Array with Shared FET Gate Electrodes
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Solution Overview
Problem
Conventional gas sensors using FET devices face challenges in manufacturing sensor arrays due to structural limitations, making it difficult to detect various types of gases efficiently.
Innovation Solution
A gas sensor configuration that includes an FET device with multiple gate electrodes, a sensor array with each sensor connected to the FET device's gate electrodes, and a controller that detects gas using current changes between the drain-source in response to voltage changes, allowing for efficient gas detection through a single FET device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a gas detection film is disposed to contact the lateral surface of the gate electrode to enable gas detection, then gas sensing capability is achieved, but manufacturing complexity increases and sensor array formation becomes difficult
Solution Approach 1:
The patent transitions from lateral surface contact (3D complex structure) to top surface contact (2D planar structure) of the gate electrode. The gas detection film is repositioned from the side surface to the upper surface of the gate electrode, simplifying the spatial arrangement and enabling easier integration into sensor arrays while maintaining detection functionality through the gate's electric field interaction.
Solution Approach 2:
The gate electrode structure is designed to serve dual functions: maintaining its original field effect transistor control function while also serving as a platform for gas detection through its upper surface. This multi-functional design eliminates the need for separate detection structures, simplifying manufacturing and enabling array formation.
2Adaptability or versatility
If multiple FET devices are used to detect various types of gases, then gas detection versatility is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
A single FET device is designed to detect multiple gas types by contacting the upper surface of the gate electrode with a gas detection film. The system achieves versatility through selective functionalization of the detection film rather than requiring multiple specialized sensors, thereby reducing overall device complexity.
Solution Approach 2:
The patent utilizes changes in the electrical parameters of the FET (such as threshold voltage and channel current) in response to gas interactions with the detection film. By monitoring these parameter changes, the system can identify different gas types without requiring structurally different sensors, thus maintaining simplicity while achieving versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies signal processing, enhances gas selectivity, and improves production efficiency by allowing for a variety of sensor modifications, reducing deviations and drift characteristics, and enabling efficient gas particle absorption through separate substrate heating.
Implementation Method 1
a detection film interposed between the first electrode and the second electrode
Implementation Method 2
a controller detecting a gas using a current between a drain-source in response to voltage changes in the gate electrode of the FET device
Data Source
AI summary
The gas sensor according to an exemplary embodiment of the present invention comprises: an FET device including one or more gate electrodes; a sensor array part including a plurality of sensors, in which a first electrode of each sensor is connected to at least one gate electrode of the plurality of gate electrodes in the FET device; and a controller detecting a gas using a current between a drain-source in response to voltage changes in the gate electrode of the FET device, wherein each sensor includes: a first electrode connected to a gate electrode of the FET device; a second electrode receiving an operating voltage through a switch controlled by the controller; and a detection film interposed between the first electrode and the second electrode.